“…β-Ga 2 O 3 is a promising ultrawide bandgap semiconductor with a bandgap energy of near 4.9 eV. [1][2][3][4][5][6] Ga 2 O 3 is being widely investigated for use in high-power devices, solar-blind detectors, sensors, and extreme environments.…”
The ion implantation of H+ and D+ into Ga2O3 produces several O–H and O–D centers that have been investigated by vibrational spectroscopy. These defects include the dominant VGa(1)-2H and VGa(1)-2D centers studied previously along with additional defects that can be converted into this structure by thermal annealing. The polarization dependence of the spectra has also been analyzed to determine the directions of the transition moments of the defects and to provide information about defect structure. Our experimental results show that the implantation of H+ (or D+) into Ga2O3 produces two classes of defects with different polarization properties. Theory finds that these O–H (or O–D) centers are based on two shifted configurations of a Ga(1) vacancy that trap H (or D) atom(s). The interaction of VGa(1)-nD centers with other defects in the implanted samples has also been investigated to help explain the number of O–D lines seen and their reactions upon annealing. Hydrogenated divacancy VGa(1)-VO centers have been considered as an example.
“…β-Ga 2 O 3 is a promising ultrawide bandgap semiconductor with a bandgap energy of near 4.9 eV. [1][2][3][4][5][6] Ga 2 O 3 is being widely investigated for use in high-power devices, solar-blind detectors, sensors, and extreme environments.…”
The ion implantation of H+ and D+ into Ga2O3 produces several O–H and O–D centers that have been investigated by vibrational spectroscopy. These defects include the dominant VGa(1)-2H and VGa(1)-2D centers studied previously along with additional defects that can be converted into this structure by thermal annealing. The polarization dependence of the spectra has also been analyzed to determine the directions of the transition moments of the defects and to provide information about defect structure. Our experimental results show that the implantation of H+ (or D+) into Ga2O3 produces two classes of defects with different polarization properties. Theory finds that these O–H (or O–D) centers are based on two shifted configurations of a Ga(1) vacancy that trap H (or D) atom(s). The interaction of VGa(1)-nD centers with other defects in the implanted samples has also been investigated to help explain the number of O–D lines seen and their reactions upon annealing. Hydrogenated divacancy VGa(1)-VO centers have been considered as an example.
“…95 Likewise, in 2002, they reported the high sensitivity of group III nitride-based gas sensors to nitrogen dioxide (NO 2 ) and the potential use of GaN Schottky diode-based sensors. 3–40 Chung et al 87 demonstrated AlGaN/GaN high-electron mobility transistor (HEMT) sensors for hydrogen gas detection at high temperatures and under exposure to irradiation. This gas sensor was fabricated on AlGaN/GaN with Si as the substrate using platinum (Pt) as the gate electrode material for hydrogen detection in the gate area.…”
Section: Metal and Semiconductor Group III Nitride-based Gas Sensorsmentioning
confidence: 99%
“…Further, many acidic and basic solutions present in living tissues can corrode Si easily. 11 Thus, it is necessary to find materials with chemical resistance and high temperature/high power capability with the sensing property of semiconductors.…”
III-nitrides are attracting considerable attention as promising materials for a variety of applications due to their wide bandgap, high electron mobility, high thermal stability and many other exceptional properties. This...
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