MRS Proc. 2001 DOI: 10.1557/proc-688-c7.9.1 View full text
Luke S.-J. Peng, Nina F. Heinig, Brian H. Moeckly

Abstract: AbstractWe have successfully grown SrTiO3 films on LaAlO3 and MgO substrates up to 2” in diameter using the deposition technique of reactive coevaporation. We have explored a wide range of deposition temperatures, oxygen pocket pressures, and compositions in order to determine the optimal growth process window. X-ray diffraction analyses indicate that the process window for growth on MgO substrates is narrower than for LaAlO3 substrates. Dielectric property measurements show that samples near stoichiometry hav…

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