Rational Design of Si(B)Cn Microstructures Using Direct Photolithography of Patternable Preceramic Photoresists

Hanniet, Quentin; Petit, Eddy; Calas-Etienne, Sylvie; Etienne, Pascal; Aissou, Karim; Gervais, Christel; Miele, Philippe; Charlot, B.; Salameh, Chrystelle

doi:10.2139/ssrn.4116057

Cited by 1 publication

(3 citation statements)

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“…Depending on the type of photoresist, exposing it to light either removes or leaves the sensitive layer behind (positive or negative, respectively). As a result, the pattern is transferred from the overlaying mask to the photoresist [63]. Following that, other techniques such as etching are used.…”

Section: Photolithographymentioning

confidence: 99%

“…Photolithography's rapid and selective UV-curing allows for faster fabrication than soft lithography. In light of this, there has been an increase in the preparation of preceramic photoresists [63].…”

Section: Photolithographymentioning

confidence: 99%

“…As previously stated, the soft lithography process is relatively slow due to the extensive steps and processes involved. As a result, photolithography is preferred for ease of fabrication [63]. There are five types of soft lithography, which include micro-moulding in capillaries, micro-transfer moulding, micro-contact printing, replica moulding and solventassisted micro-moulding [81].…”

Section: Soft Lithographymentioning

confidence: 99%

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Role of Nanomaterials in the Fabrication of bioNEMS/MEMS for Biomedical Applications and towards Pioneering Food Waste Utilisation

et al. 2022

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bioNEMS/MEMS has emerged as an innovative technology for the miniaturisation of biomedical devices with high precision and rapid processing since its first R&D breakthrough in the 1980s. To date, several organic including food waste derived nanomaterials and inorganic nanomaterials (e.g., carbon nanotubes, graphene, silica, gold, and magnetic nanoparticles) have steered the development of high-throughput and sensitive bioNEMS/MEMS-based biosensors, actuator systems, drug delivery systems and implantable/wearable sensors with desirable biomedical properties. Turning food waste into valuable nanomaterials is potential groundbreaking research in this growing field of bioMEMS/NEMS. This review aspires to communicate recent progress in organic and inorganic nanomaterials based bioNEMS/MEMS for biomedical applications, comprehensively discussing nanomaterials criteria and their prospects as ideal tools for biomedical devices. We discuss clinical applications for diagnostic, monitoring, and therapeutic applications as well as the technological potential for cell manipulation (i.e., sorting, separation, and patterning technology). In addition, current in vitro and in vivo assessments of promising nanomaterials-based biomedical devices will be discussed in this review. Finally, this review also looked at the most recent state-of-the-art knowledge on Internet of Things (IoT) applications such as nanosensors, nanoantennas, nanoprocessors, and nanobattery.

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Section: Photolithographymentioning

confidence: 99%

Section: Photolithographymentioning

confidence: 99%