Rapid Focused Ion Beam Milling Based Fabrication of Plasmonic Nanoparticles and Assemblies <i>via</i> “Sketch and Peel” Strategy

Chen, Yiqin; Bi, Kaixi; Wang, Qianjin; Zheng, Mengjie; Liu, Qing; Han, Yunxin; Yang, Junbo; Chang, Shengli; Zhang, Hang; Duan, Huigao

doi:10.1021/acsnano.6b06290

Cited by 123 publications

(93 citation statements)

References 46 publications

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“…Selective polymer growth can also be accomplished on lithographically-fabricated nanostructures (Fig. S6 in the ESM) [21,22], which provides a useful technique towards functional nanophotonic and nanoelectronic devices.…”

Section: Local Selective Polymer Growth With Plasmonsmentioning

confidence: 99%

Plasmon-directed polymerization: Regulating polymer growth with light

Wang

Zhang

et al. 2018

Nano Res.

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Plasmon-induced polymerization can facilitate the site-selectivity and orientation of polymer growth, which enriches the toolbox of polymerization and nanofabrication. Here, we demonstrate plasmon-induced polymerization, accomplished by low-power laser excitation of gold nanoparticles (NPs). We selectively control the growth of polymers around single plasmonic NPs while monitoring the polymerization using dark field spectroscopy and subsequent scanning electron microscopy. This plasmon-induced polymerization, generated by hot electron initiation, not only precisely controls the thickness and composition of the polymer coatings but also regulates the location and orientation of the growth, which are strongly influenced by the laser polarization and near-field distribution around the plasmonic NPs. A saturation increase in the polymer thickness provides a strong support for our mechanism. This facile approach of nanoscale polymerization directed by light not only provides new opportunities in nanosynthesis and nanofabrication for functional devices, but also opens many routes for polymer physics and chemistry at the nanoscale level.

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Section: Local Selective Polymer Growth With Plasmonsmentioning

confidence: 99%

Plasmon-directed polymerization: Regulating polymer growth with light

Wang

Zhang

et al. 2018

Nano Res.

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“…Chapter S2 of the Supporting Information). The dimer antennas remained on the substrate because of the formation of a sidewall coating [52]. Here, charging effects of the sample during the image acquisition precluded high-resolution SEM images of isolated, stripped dimer antennas.…”

Section: Sample Preparationmentioning

confidence: 99%

“…At higher ion doses, the ion bombardment can lead to an undesired implantation of helium at the substrate-metal interface [51]. To overcome this issue, Chen et al [52] introduced a simple, fast, and reliable fabrication technique called "sketch and peel"-based FIB milling (SaP). In this process, a FIB at an appropriate dose is used to sketch only the outline of the desired plasmonic nanostructure to completely separate the particle and the rest of the film.…”

Section: Introductionmentioning

confidence: 99%

Strongly coupled, high-quality plasmonic dimer antennas fabricated using a sketch-and-peel technique

et al. 2019

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A combination of helium- and gallium-ion beam milling together with a fast and reliable sketch-and-peel technique is used to fabricate gold nanorod dimer antennas with an excellent quality factor and with gap distances of less than 6 nm. The high fabrication quality of the sketch-and-peel technique compared to a conventional ion beam milling technique is proven by polarisation-resolved linear dark-field spectromicroscopy of isolated dimer antennas. We demonstrate a strong coupling of the two antenna arms for both fabrication techniques, with a quality factor of more than 14, close to the theoretical limit, for the sketch-and-peel–produced antennas compared to only 6 for the conventional fabrication process. The obtained results on the strong coupling of the plasmonic dimer antennas are supported by finite-difference time-domain simulations of the light-dimer antenna interaction. The presented fabrication technique enables the rapid fabrication of large-scale plasmonic or dielectric nanostructures arrays and metasurfaces with single-digit nanometer scale milling accuracy.

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“…[1][2][3][4] The hotspots from giant nanofocusing effect strongly enhance the interaction between electromagnetic waves and metallic nanoparticles Adv. [15,16] In this process, only the outline template of the target structures is defined, and then, the target structures can be obtained via selective stripping of the deposited metallic film. 2020, 8,1901202 www.advopticalmat.de Motivated by this demand on plasmonic nanogap fabrication, we previously developed a "Sketch and Peel" lithography (SPL) process for high-resolution multiscale patterning of plasmonic nanogaps.…”

Section: Introductionmentioning

confidence: 99%

Adhesion‐Engineering‐Enabled “Sketch and Peel” Lithography for Aluminum Plasmonic Nanogaps

Chen

Zhang

Shu

et al. 2019

Advanced Optical Materials

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in the near field and amplify both linear and nonlinear phenomena at the singlemolecule and single-particle level. [5][6][7][8][9] Choosing an appropriate plasmonic material is significant for different plasmonic applications, usually considering the cost, performance, and process compatibility. Among these materials, silver (Ag) is favored due to its low loss, which supports a strong plasmon resonance in the visible and near-infrared regions. [10] However, the oxidization of Ag in air greatly changes its optical properties, which severely limits the practical use of metallic Ag in plasmonics. In contrast, gold (Au) is a better choice due to its excellent chemical stability, but it suffers from a high intrinsic absorption of photon energy higher than 2.38 eV. As a result, making full use of Au for plasmon-enhanced spectroscopic applications, such as surface-enhanced Raman spectroscopy (SERS) and nonlinear optics in the entire visible region, is difficult.Compared to Au and Ag, aluminum (Al) is a more promising material for plasmonics, with the merits of oxidation stability superior to that of Ag and the extended optical response ranging from the ultraviolet to visible regime compared to that of Au. [11,12] Nevertheless, the optical loss of Al degrades the nanofocusing effect, which weakens the localization of light field in the nearfield of Al plasmonic nanostructures. For these reasons, tiny plasmonic nanogaps play a significant role in achieving large electric-field enhancement factor for practical applications of Al plasmonics.From the perspective of fabrication process, the plasmonic nanogaps in metallic structures are intrinsically a type of multiscale configuration, usually ranging from several nanometers to several hundreds of nanometers. To obtain plasmonic nanogaps, electron-beam lithography (EBL) is a key tool due to its advantages of high resolution and accuracy in patterning. [13,14] Traditionally, the whole area of final patterns separated by nanogaps should be fully exposed. However, this patterning strategy has limited resolution and accuracy in gap fabrication due to the large proximity effect caused by electron scattering. Furthermore, this kind of challenge becomes more apparent when fabricating nanogaps in plasmonic nanostructures, which commonly involves metal deposition and lift-off processes.Aluminum is one of the most significant plasmonic materials for its advantage of low cost, natural abundance, as well as the ultraviolet optical response. However, it is still very challengeable for the fabrication of aluminum plasmonic nanogaps, which greatly limits the applications of aluminum plasmonics considering the essential role of nanogaps for electric field enhancement. Here, the reliable patterning of aluminum plasmonic nanogaps employing a modified "Sketch and Peel" lithography strategy is demonstrated. By introducing a self-assembled monolayer to engineer the surface energy of the substrate, the adhesiveness of the aluminum film outside outline template is significantly decreased to implemen...

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Rapid Focused Ion Beam Milling Based Fabrication of Plasmonic Nanoparticles and Assemblies via “Sketch and Peel” Strategy

Cited by 123 publications

References 46 publications

Plasmon-directed polymerization: Regulating polymer growth with light

Plasmon-directed polymerization: Regulating polymer growth with light

Strongly coupled, high-quality plasmonic dimer antennas fabricated using a sketch-and-peel technique

Adhesion‐Engineering‐Enabled “Sketch and Peel” Lithography for Aluminum Plasmonic Nanogaps

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