2010
DOI: 10.1143/jjap.49.094102
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Random Telegraph Signal-Like Fluctuation Created by Fowler–Nordheim Stress in Gate Induced Drain Leakage Current of the Saddle Type Dynamic Random Access Memory Cell Transistor

Abstract: We generated traps inside gate oxide in gate-drain overlap region of recess channel type dynamic random access memory (DRAM) cell transistor through Fowler-Nordheim (FN) stress, and observed gate induced drain leakage (GIDL) current both in time domain and in frequency domain. It was found that the trap inside gate oxide could generate random telegraph signal (RTS)-like fluctuation in GIDL current. The characteristics of that fluctuation were similar to those of RTS-like fluctuation in GIDL current observed in… Show more

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Cited by 9 publications
(4 citation statements)
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“…Previous work has shown that each VRT cell spends an exponentially distributed amount of time in each state [14,31], and that the distribution of time constants for these exponential distributions is itself exponentially distributed [15]. The shape of our observed distributions appear to be consistent with this prior work.…”
Section: Time Between State Changessupporting
confidence: 87%
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“…Previous work has shown that each VRT cell spends an exponentially distributed amount of time in each state [14,31], and that the distribution of time constants for these exponential distributions is itself exponentially distributed [15]. The shape of our observed distributions appear to be consistent with this prior work.…”
Section: Time Between State Changessupporting
confidence: 87%
“…This is because the charge trapping process that is believed to cause a retention time change is a memoryless random process [14]. (This is why time spent in each retention time state is exponentially distributed.)…”
Section: Implications For Retention Time Profilingmentioning
confidence: 99%
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“…5,6) Recently, an RTN (RTS)-like fluctuation in gate-induced drain leakage current (GIDL) has been reported. [7][8][9][10][11][12] This RTN-like fluctuation is considered to be the same as the phenomenon that we previously reported, 4,13) because GIDL is a type of reversebiased junction leakage current. 14) From the viewpoints of low standby power and the suppression of erratic operation, it is important to understand the mechanism of the fluctuations in off-state-drain-leakage current.…”
Section: Introductionmentioning
confidence: 79%