Raman spectroscopy analysis of the chemical structure of diamond-like carbon films deposited via high-frequency inclusion high-power impulse magnetron sputtering

Fukue, Hiroyuki; Nakatani, Tatsuyuki; Takabayashi, Susumu; Okano, Tadayuki; Kuroiwa, Masahide; Kunitsugu, Shinsuke; Oota, Hiroki; Yonezawa, Ken

doi:10.1016/j.diamond.2023.110768

Diamond and Related Materials

2024

DOI: 10.1016/j.diamond.2023.110768

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Raman spectroscopy analysis of the chemical structure of diamond-like carbon films deposited via high-frequency inclusion high-power impulse magnetron sputtering

Hiroyuki Fukue,

Tatsuyuki Nakatani,

Susumu Takabayashi

et al.

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Chemometric Raman Spectral Analysis of Diamond-like Carbon Films Deposited by Plasma Discharge

Osano,

Fukue,

Takabayashi

et al. 2024

J. Photopol. Sci. Technol.

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In this study, a chemometric approach for five-peak separation analysis of the Raman spectra of diamond-like carbon (DLC) films was investigated. DLC films were deposited by highfrequency inclusion high-power impulse magnetron sputtering and alternating current high voltage burst plasma chemical vapor deposition. We used the pseudo-Voigt function as an alternative to the conventional Voigt function and applied the nonlinear least squares method. The results not only facilitate automated analysis but also guarantee highly accurate results regardless of the analyst's level of expertise. This approach is expected to lead to consistent interpretation of Raman spectral analysis of DLC films and further research and understanding of the properties of DLC films.

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Chemometric Raman Spectral Analysis of Diamond-like Carbon Films Deposited by Plasma Discharge

Osano,

Fukue,

Takabayashi

et al. 2024

J. Photopol. Sci. Technol.

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show abstract

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Raman spectroscopy analysis of the chemical structure of diamond-like carbon films deposited via high-frequency inclusion high-power impulse magnetron sputtering

Cited by 1 publication

References 43 publications

Chemometric Raman Spectral Analysis of Diamond-like Carbon Films Deposited by Plasma Discharge

Chemometric Raman Spectral Analysis of Diamond-like Carbon Films Deposited by Plasma Discharge

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