1971
DOI: 10.1002/ctpp.19710110107
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Radiale Änderungen der Energieverteilungsfunktion der Elektronen im Plasma der positiven Säule elektrischer Entladungen

Abstract: I n the low-current positive column measurements of the electron energy distribution function show considerable changes in radial direction. At any point of the positive column of the Ne-discharge under investigation it is possible t o approximate the energy distribution function by the DRUYvEsTEYN-standard form. For the case of standard energy distribution functions a theory of positive column is developed which takes into account radial changes of electron temperature. Formulae for the calculation of radial … Show more

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Cited by 27 publications
(5 citation statements)
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“…The results of the electron-distribution-function measurements under low and high pressures along the radius of the discharge tube reveal various features which are well explained by the considerations of electron kinetics by kinetic and diffusion theories. For instance, measurements of the radial potential and EDFs with the help of a Langmuir probe in low-pressure discharges [19][20][21][22] convincingly demonstrate that the total energy is in fact the argument of the distribution function. Measurements of the EDF at pressures of tens of Torr with the help of a probe in the diffusion regime under conditions of the fulfillment of the premises of diffusion theory show that the EDF can be represented as the product of the radially dependent electron density and the distribution function dependent on the kinetic energy and independent of the radial coordinate [22].…”
Section: A Comparison With Results Of Experimentsmentioning
confidence: 99%
“…The results of the electron-distribution-function measurements under low and high pressures along the radius of the discharge tube reveal various features which are well explained by the considerations of electron kinetics by kinetic and diffusion theories. For instance, measurements of the radial potential and EDFs with the help of a Langmuir probe in low-pressure discharges [19][20][21][22] convincingly demonstrate that the total energy is in fact the argument of the distribution function. Measurements of the EDF at pressures of tens of Torr with the help of a probe in the diffusion regime under conditions of the fulfillment of the premises of diffusion theory show that the EDF can be represented as the product of the radially dependent electron density and the distribution function dependent on the kinetic energy and independent of the radial coordinate [22].…”
Section: A Comparison With Results Of Experimentsmentioning
confidence: 99%
“…For a recent review about these distributions, the reader is referred to [80], and the original works can be found in Refs. [81,82,83] We present two examples. The first example is shown in Table 4, and depicts the fitted plasma parameters with different V * starting from all the experimental data up to V * = V f .…”
Section: Discussionmentioning
confidence: 99%
“…The second derivative of the probe current with respect to the probe potential gives the EEDF f (W ), as follows [11,[15][16][17]:…”
Section: Gas Supplier Vaccum Systemmentioning
confidence: 99%