Cd 3 As 2 is a new kind of three-dimensional (3D) Dirac semimetal with extraordinary carrier mobility, which can be viewed as '3D graphene'. Theory predicts that Cd 3 As 2 can be driven into a quantum spin Hall insulator with a sizeable band gap by reducing dimensionality. In this letter, we report the systematic growth of undoped Cd 3 As 2 thin films with the thickness of 50∼900 nm by molecular beam epitaxy. The magneto-transport study on these single-crystalline films shows a high mobility in the range of 3.8∼9.1×10 3 cm 2 ·V −1 ·s −1 and a relative low electron concentration of 1∼8×10 17 cm −3 . Significantly, a thickness-induced semimetal-to-semiconductor transition was observed. In contrast with what is expected in the bulk counterpart, the 50 nm-thick Cd 3 As 2 film exhibits semiconducting characteristics, witnessing an emerged bandgap opening when the dimensionality is reduced. Finally, the analyses on the temperature-and angular-dependence of magneto-resistance and Shubnikov-de Hass oscillations reveal a non-trivial to trivial Berry's phase transition that is in connection with the reduced dimensionality. Our results demonstrate that the Cd 3 As 2 thin films with unique electronic structure and high mobility hold promise for Dirac semimetal device applications.Three-dimensional (3D) topological Dirac semimetals (TDSs), such as Na 3 Bi [1, 2] and Cd 3 As 2 [3], have been theoretically predicted and experimentally realized in recent years. These TDSs have unique physical properties originating from 3D massless Dirac fermions. The Dirac nodes are developed due to the touching of valence and conduction bands at discrete points in the reciprocal space. Interestingly, for these 3D Dirac materials, they can be driven into various phases, such as Weyl semimetal [4] and topological insulator (TI) [5, 6] by breaking time reversal or inversion symmetry. Driven by these intriguing physical properties, extensive experiments on angleresolved photoemission spectroscopy (ARPES) [7-10] and scanning tunneling microscopy (STM) [11] were carried out to identify the 3D Dirac fermions in these materials.Cd 3 As 2 is considered to be an excellent 3D TDS due to its chemical stability in air, and it also possesses novel transport phenomena such as ultrahigh mobility [12], large magneto-resistance (MR) [13], non-trivial π Berry's phase of Dirac fermions [14] and chiral anomaly induced negative MR [15,16]. Previously, Cd 3 As 2 bulk materials, amorphous films [17], nanowires [18] and platelets [19] were prepared by various growth methods, and most magneto-transport measurements so far have focused on Cd 3 As 2 bulk materials. However, few efforts were devoted to thin films [20-22] and nanostructures [18,23], which may exhibit surface phase coherent transport and quantum size limit effect [24][25][26], leading to Aharonov-Bohm oscillations [27] and the exotic quantum Hall insulator states [3]. Importantly, a theoretically predicted TI phase and thickness-dependent quantum oscillations may also eventually emerge when th...