2017
DOI: 10.1016/j.diamond.2016.09.026
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Quantitative NEXAFS and solid-state NMR studies of sp 3 /( sp 2 + sp 3 ) ratio in the hydrogenated DLC films

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Cited by 24 publications
(19 citation statements)
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“…2,[8][9][10] In these classification schemes, the amorphous carbon films can be categorized into six types: tetrahedral amorphous carbon (ta-C), hydrogenated tetrahedral amorphous carbon, amorphous carbon, hydrogenated amorphous carbon (a-C:H), graphite-like carbon, and polymer-like carbon (PLC) films. 2,7 The hydrogen content and sp 2 /(sp 2 þ sp 3 ) ratio play crucial roles in these schemes. The former can be measured by the Rutherford backscattering/elastic recoil detection analysis (RBS/ERDA) using an electrostatic accelerator, 11,12 and the latter can be measured by the near-edge X-ray absorption fine-structure (NEXAFS) based on synchrotron radiation.…”
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confidence: 99%
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“…2,[8][9][10] In these classification schemes, the amorphous carbon films can be categorized into six types: tetrahedral amorphous carbon (ta-C), hydrogenated tetrahedral amorphous carbon, amorphous carbon, hydrogenated amorphous carbon (a-C:H), graphite-like carbon, and polymer-like carbon (PLC) films. 2,7 The hydrogen content and sp 2 /(sp 2 þ sp 3 ) ratio play crucial roles in these schemes. The former can be measured by the Rutherford backscattering/elastic recoil detection analysis (RBS/ERDA) using an electrostatic accelerator, 11,12 and the latter can be measured by the near-edge X-ray absorption fine-structure (NEXAFS) based on synchrotron radiation.…”
mentioning
confidence: 99%
“…[2][3][4][5] With the continuous expansion of the research, the effective classification of amorphous carbon films has become necessary because their properties depend strongly on the conditions and methods of synthesis. 6,7 In order to classify the amorphous carbon films systematically, many attempts have been made so far. 2,[8][9][10] In these classification schemes, the amorphous carbon films can be categorized into six types: tetrahedral amorphous carbon (ta-C), hydrogenated tetrahedral amorphous carbon, amorphous carbon, hydrogenated amorphous carbon (a-C:H), graphite-like carbon, and polymer-like carbon (PLC) films.…”
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confidence: 99%
“…, and hydrogen terminations [2,3]. Many structural models have been proposed to describe the role of each component in DLC films.…”
Section: Introductionmentioning
confidence: 99%
“…It was proposed in 2013 [11], for which a lot of considerable discussion in the past ISO/TC-107 meetings in 2016 (BSI, UK) and 2017 (Tokyo, Japan) has been made [12]. Since this method needs to use only an SE without the largescale equipment (the hydrogen content was measured by the RBS/ERDA using an electrostatic accelerator [13], and the sp 2 /(sp 2 + sp 3 ) ratio was obtained by NEXAFS based on synchrotron radiation [2,7,14]), it is more conducive to simplify the classification of DLC films. However, it is necessary to discuss the consistency between the structural analyses made with SE and NEXAFS.…”
Section: Introductionmentioning
confidence: 99%
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