R. Kalyanaraman, T.E. Haynes, D.C. Jacobson, H.-J. Gossmann, C.S. Rafferty
Abstract:AbstractMonte Carlo simulation codes such as TRIM or MARLOWE show a net displacement of interstitials with respect to vacancies from the Frenkel pairs produced in implant cascades. As a result, defect profiles after recombination have an excess of vacancies (Vex) in the shallow region of these implants, with excess interstitials near the projected range Rp. Typically, accurate estimates of the Vex distribution are computer intensive as the complete history of each damage cascade must be recorded. In this work …
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