KeywordsGlow-discharge mass spectrometry, depth analysis, crater shape, Grimm-type, inductively coupled plasma mass spectrometer Glow-discharge mass spectrometry (GD-MS) is becoming of increased interest for bulk and in-depth analyses of solid samples. In our previous studyl, a Grimm-type GD ion source was successfully interfaced with a commercial quadrupole mass spectrometer that was used for inductively coupled plasma mass spectrometry. The obtained crater profiles, however, generally had a convex shape. Although various efforts2~ in GD emission spectrometry have been aimed at achieving a flat bottom of the crater for better depth resolution, the discharge parameters which affect the crater shape varied, depending on the type of GD tube used.In the present experiments, the parameters that affect the crater shape were studied; it was found that the inner diameter of the anode has a significant effect in producing a flat-bottom crater. Under the proper conditions chosen for GD-MS, the ability to analyze multi-layered samples was demonstrated.
Experimental InstrumentationThe Grimm-type cell used is shown in Fig. 1. The main body was made of brass and machinable ceramic Macor. The anode cylinder was screw-fitted so that various types of anodes could be easily changed. The employment of an aperture (0.6 -1.0 mm dia.) into the discharge cell was found to be more flexible in controlling the cell pressure and current. The flat anode with a 1.0-mm aperture shown in the inset of Fig. l was also used for a comparison. The anode body was bolted onto the interface of the first expansion stage of the commercial ICP mass spectrometer (SPQ 6100A, Seiko Instr. Inc.), replacing the sampling cone. The anode was insulated from the mass spectrometer body with Teflon, and was positively biased against the grounded skimmer in order to extract ions effectively.5 A flat sample was simply mounted by pressing it onto the 0-ring of the face of the cell. Cooling of the sample was provided by a water-cooled copper disk.Ar gas (99.999 %) was fed through a 0.2-mm gap between the anode tube and the cathode body. The opposite direction of gas flow to the conventional Grimmtype cell resulted in an increase in the ion intensities by a factor of ca. 2 compared to the ordinary direction. After a sample was mounted, the GD cell was evacuated; the vacuum pump of the first stage was then stopped before Ar gas was introduced. Therefore, the introduced gas could be balanced with that extracted by the skimmer, while retaining a constant cell pressure at equilibrium.Brass disk samples of 30-mm diameter were used. After the sample surfaces were successively ground by sand paper (mesh # 240, 600 and 1200) they were ultrasonically cleaned for 20 min in ethanol. Multi-layered samples were prepared by electroplating nickel and copper alternately on a copper substrate. Well-defined nickel and copper layers of a few hum were obtained by 15 -40 min electroplating of each layer. The crater profile was measured with a surface-roughness meter (Surfcom 110B, Tokyo S...