2005
DOI: 10.1021/jp0441893
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Abstract: Following our previous works on pure-silica-zeolite (PSZ) MFI, in this study we explore PSZ MEL as a new option for low-k dielectric films. Our motivation has been to increase the microporosity of the spin-on films by moving to structures with a framework density (FD) lower than MFI. Nanoparticle PSZ MEL suspensions were synthesized by a two-stage method that allowed the yield of nanocrystals to be significantly enhanced, while the zeolite nanocrystals remain small. For the first time zeolite nanocrystals of a… Show more

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Cited by 73 publications
(119 citation statements)
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“…Synthesis of PSZ MFI and MEL thin films investigated in the present study were previously described in detail [1,6,18]. MFI thin films were synthesized by in situ crystallization and were b-oriented.…”
Section: Methods and Experiments 21 Sample Film Preparationmentioning
confidence: 99%
See 3 more Smart Citations
“…Synthesis of PSZ MFI and MEL thin films investigated in the present study were previously described in detail [1,6,18]. MFI thin films were synthesized by in situ crystallization and were b-oriented.…”
Section: Methods and Experiments 21 Sample Film Preparationmentioning
confidence: 99%
“…The MEL films were prepared by spin coating a zeolite nanoparticle suspension onto silicon substrates. The MEL suspension was synthesized by a two-stage process [1]. The first stage consisted of a 2 days heating and stirring of a tetraethylorthosilicate (TEOS) based solution at 80 • C resulting in a MEL nanoparticle suspension.…”
Section: Methods and Experiments 21 Sample Film Preparationmentioning
confidence: 99%
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“…Zeolites are used as catalysts, adsorbents & in chemical separation (Breck, 1974). As a result of larger accessible surface area & an easily mass transfer process of nanocrystals, zeolites can also be manipulated in establishing application such as sensing, medical diagnosing & low-dielectric insulating (Li et al, 2005). Sources of water pollution of all kinds (industrial & agricultural wastes, sewage, etc.)…”
Section: Introductionmentioning
confidence: 99%