Pulsed laser deposition of diamond-like carbon coatings for industrial tribological applications

Lackner, J.M.; Stotter, Christoph; Waldhauser, W.; Ebner, R.; Lenz, W.H.; Beutl, Michael

doi:10.1016/s0257-8972(03)00392-x

Cited by 44 publications

(24 citation statements)

References 15 publications

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“…The energy shift is estimated as 0.6 eV which is a little higher than that of graphite, 0.4 eV. 18,19 This suggests that the organic contaminants were transformed to conducting carbon compounds. The accelerated electron voltage, 2 kV, used in this study is large enough to produce 100 eV of secondary electrons, breaking the atomic bonds of organic compounds.…”

Section: Resultsmentioning

confidence: 96%

Analysis of Organic Contamination Adsorbed on a Silicon Surface in a Vacuum Chamber in Electron Beam Lithography

Saga

Hattori

2005

J. Electrochem. Soc.

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Organic contaminants adsorbed on the surface of a silicon stencil mask in a high-vacuum chamber in an electron-beam exposure lithography system have been analyzed and identified using thermal-desorption gas chromatography/mass spectrometry ͑TD-GC/ MS͒, X-ray photoelectron spectrometry ͑XPS͒, and electron energy loss spectroscopy ͑EELS͒. The major organic compound adsorbed onto the surface of the silicon stencil mask in the high vacuum chamber has been found to be di-2-ethylhexyl phthalate ͑DOP͒. The amount of DOP adsorbed onto the silicon surface in high vacuum is much larger than that adsorbed in ambient air. A relatively high molar ratio and long mean free path of organic molecules with a low vapor pressure, such as DOP, in high vacuum is considered to enable them to be easily adsorbed onto the silicon surface in high vacuum. On the other hand, organic volatiles with higher vapor pressure are not adsorbed on the silicon surface in high vacuum. It has been found by XPS and EELS that the organic contaminants adsorbed on the surface of the silicon stencil mask are transformed into graphite-like carbon by electron beam irradiation during the exposure process.

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Section: Resultsmentioning

confidence: 96%

Analysis of Organic Contamination Adsorbed on a Silicon Surface in a Vacuum Chamber in Electron Beam Lithography

Saga

Hattori

2005

J. Electrochem. Soc.

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“…In majority, it is characterized by sp 2 bonds [22]. During the wear process, because of the presence of a relatively soft phase at the surface of the coating, the mechanical contact would be much better.…”

Section: Localized Corrosion Experimentsmentioning

confidence: 99%

Microstructure characterization of localized corrosion wear of Cr/Cr2N+ a-C:H/a-C:H:Cr multilayer coatings on carbon fiber composites

Janusz¹,

Major²,

Lackner³

et al. 2017

Bulletin of the Polish Academy of Sciences Technical Sciences

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Abstract. The use of carbon fiber composites (CFC) for different applications is widespread. Carbon-based materials show, however, significant oxidative degradation in air. Modern materials are subjected to aggressive, corrosive environment. This type of environment may strongly reduce their mechanical properties. For the protection of CFC, it was necessary to apply coatings to the composite surface. In the presented paper, a chromium/chromium nitride (Cr/Cr2N) multilayer structure has been selected as the inner part. The outer part of the coating was a hydrogenated amorphous carbon (a-C:H), gradually implanted by Cr nanocrystals. The application of transmission electron microscopy (TEM) indicated that the proposed deposition method allowed the formation of a Cr/Cr2N multilayer of Λ = 150 nm, topped with a-C:H+ Cr23C6 composite of a varied carbides density. The micro-hardness of the deposited coatings was up to 14 GPa (at a load of 2 and 5 mN). The microstructure of the deposited coatings was described in detail by means of TEM in the authors' recently published paper [1]. This paper is a continuation thereof, aimed at describing microstructure changes after a localized corrosion process. In order to study localized corrosion in coatings, particularly in metallic (Cr) interlayers, the potential measurements and voltammetry experiments were performed in a Ringer solution. The open-circuit potential reaches stable values after a sufficient time period. The results indicated that the presence of a-C:H+Cr23C6, the outer part of the coating, speeds up the localized corrosion process in Cr interlayers in the inner part of a coating.

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“…Carbon thin films are extensively studied given their widespread application as, gas sensors [1], wear and corrosion resistant coatings [2], field emitters in flat panel displays [3], to name a few. Carbon films also serve as good candidates for biocompatible coatings.…”

Section: Introductionmentioning

confidence: 99%

Pulsed laser deposition of graphite in air and in vacuum for field emission studies

Jadhav

Singh

Sinha

2015

Materials Chemistry and Physics

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Pulsed laser deposition of diamond-like carbon coatings for industrial tribological applications

Cited by 44 publications

References 15 publications

Analysis of Organic Contamination Adsorbed on a Silicon Surface in a Vacuum Chamber in Electron Beam Lithography

Analysis of Organic Contamination Adsorbed on a Silicon Surface in a Vacuum Chamber in Electron Beam Lithography

Microstructure characterization of localized corrosion wear of Cr/Cr2N+ a-C:H/a-C:H:Cr multilayer coatings on carbon fiber composites

Pulsed laser deposition of graphite in air and in vacuum for field emission studies

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