Pulsed laser deposition from a pre‐synthesized Cr<sub>2</sub>AlC MAX phase target with and without ion‐beam assistance

Lange, Christian; Hopfeld, Marcus; Wilke, Marcus; Schawohl, J.; Kups, Thomas; Barsoum, Michel W.; Schaaf, Peter

doi:10.1002/pssa.201127537

Cited by 13 publications

(8 citation statements)

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“…As stated by Eklund et al all these processes (CVD, sputtering, cathodic arc deposition have their own limitations that sets out the demand of other growth methods for not only Ti3AlC2 depositions but also various other MAX phase thin films [3,14]. However, we found only one report about the attempt to grow Cr2AlC MAX phase thin film by PLD, indicating vast compositional deviation from the Cr2AlC phase [32]. Therefore, we set out to examine the growth, properties and application-worthiness of thin films of a widely explored MAX phase Ti3AlC2 using PLD.…”

Section: Introductionmentioning

confidence: 70%

Growth, Properties, and Applications of Pulsed Laser Deposited Nanolaminate Ti3AlC2 Thin Films

et al. 2020

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Recently, nanolaminated ternary carbides have attracted immense interest due to the concomitant presence of both ceramic and metallic properties. Here, we grow nanolaminate Ti3AlC2 thin films by pulsed laser deposition on c-axis-oriented sapphire substrates and, surprisingly, the films are found to be highly oriented along the (103) axis normal to the film plane, rather than the (000l) orientation. Multiple characterization techniques are employed to explore the structural and chemical quality of these films, the electrical and optical properties, and the device functionalities. The 80-nm thick Ti3AlC2 film is highly conducting at room temperature, with a resistivity of about 50 µΩ cm and a very-low-temperature coefficient of resistivity. The ultrathin (2 nm) Ti3AlC2 film has fairly good optical transparency (∼70%) and high conductivity (sheet resistance ∼735 Ω/sq) at room temperature. Scanning tunneling microscopy reveals the metallic characteristics (finite density of states at the Fermi level) at room temperature. The metal-semiconductor junction of the p-type Ti3AlC2 film and n-Si show the expected rectification (diode) characteristics, in contrast to the ohmic contact behavior in the case of Ti3AlC2/p-Si. A triboelectric-nanogenerator-based touch-sensing device, comprising of the Ti3AlC2 film, shows a very impressive peak-to-peak open-circuit output voltage (∼80 V). These observations reveal that pulsed laser deposited Ti3AlC2 thin films have excellent potential for applications in multiple domains, such as bottom electrodes, resistors for high-precision measurements, Schottky diodes, ohmic contacts, fairly transparent ultrathin conductors, and next-generation biomechanical touch sensors for energy harvesting.

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Section: Introductionmentioning

confidence: 70%

Growth, Properties, and Applications of Pulsed Laser Deposited Nanolaminate Ti3AlC2 Thin Films

et al. 2020

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“…There have also been attempts to use pulsed laser deposition (PLD) and high power impulse magnetron sputtering (HiPIMS). PLD from Ti 3 SiC 2 [66] and Cr 2 AlC [67] compound targets resulted in a deviating thin film composition with no formation of MAX phase. HiPIMS, on the other hand, resulted in nanocrystalline MAX phase together with competing phases [68,69].…”

Section: Thin Film Synthesismentioning

confidence: 97%

Synthesis and Characterization of New MAX Phase Alloys

Mockuté¹

2014

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The cover image is based on a cross-sectional TEM micrograph of a high current pulsed cathodic arc deposited (Cr 0.8 Mn 0.2 ) 2 AlC thin film (20 nm thickness), revealing its island-like nature. © Aurelija MockutėISBN: 978-91-7519-407-3 ISSN 0345-7524 Printed by LiU-Tryck Linköping, Sweden, 2014 AbstractThis Thesis explores synthesis and characterization of new MAX phase alloys (M = early transition metal, A = A-group element, and X = C or N), based on incorporation of M and X elements previously not considered. My primary focus is on M = Mn for attaining magnetic properties, and on X = O for potential tuning of the transport properties. A recent theoretical study predicted (Cr 1-x Mn x ) 2 AlC MAX phase to be a stable magnetic nanolaminate. I aimed at realizing this material and through a combinatorial approach based on magnetron sputtering from elemental targets, the first experimental evidence of Mn incorporation (x = 0.16) in a MAX phase is presented. The corresponding MAX phase was also synthesized using cathodic arc film deposition (x = 0.20) and bulk synthesis methods (x = 0.06). The primary characterization techniques were X-ray diffraction and high-resolution (scanning) transmission electron microscopy in combination with energy dispersive X-ray spectroscopy and/or electron energy loss spectroscopy, to obtain a precise local quantification of the MAX phase composition and to perform lattice resolved imaging. For epitaxial film growth of (Cr 1-x Mn x ) 2 AlC, evidence is presented for the formation of (Cr 1-y Mn y ) 5 Al 8 , exhibiting a bcc structure with an interplanar spacing matching exactly half a unit cell of the hexagonal MAX phase. Consequently, routinely performed X-ray diffraction symmetric θ-2θ measurements result in peak positions that are identical for the two phases. As (Cr 1-y Mn y ) 5 Al 8 is shown to display a magnetic response, its presence needs to be taken into consideration when evaluating the magnetic properties of the MAX phase. Methods to distinguish between Populärvetenskaplig sammanfattningMaterialvetenskap inkluderar forskning på material, dess syntes, struktur och sammansättning samt resulterande egenskaper, med fokus på att utveckla nya material skräddarsydda för specifika ändamål.En viktig del inom materialvetenskapen är forskning på tunna filmer, d.v.s. lager av material med tjocklek från ett atomlager till några mikrometer. Egenskaperna hos en yta, till exempel friktion, slitmotstånd, ledningsförmåga, eller utseende, kan förbättras genom att applicera en lämplig tunnfilm.Den här avhandlingen handlar om en grupp material som kallas MAX-faser. M står för en övergångsmetall (t.ex. Ti, Cr, Nb, Sc), A för ett element från grupp A i det periodiska systemet (t.ex. Al, Si, Ge, Ga), och X står för C eller N. Atomer av tre sådana olika element staplas i en struktur bestående av rena atomlager, t.ex. M-X-M-A-M-X-M-A. Ti 2 AlC, Cr 2 AlC, Ti 3 SiC 2 och Ti 4 AlN 3 är några exempel av mer än 60 hittills upptäckta MAX-faser. Det extra spännande med MAX-faser är att de kombinerar ...

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“…A high‐power pulsed laser beam strikes a MAX phase single target in a high‐vacuum chamber, vaporizing the MAX phase and depositing it on a substrate kept at a low temperature (25°C‐800°C). PLD leads to high purities, but in the case of MAX phases, some carbides are typically detected between the nanometric MAX grains 141 . The ion‐beam has several interesting effects on film thickness and composition, concentration gradients within the films and on conductivity and hardness 141 .…”

Section: Synthesismentioning

confidence: 99%

“…PLD leads to high purities, but in the case of MAX phases, some carbides are typically detected between the nanometric MAX grains 141 . The ion‐beam has several interesting effects on film thickness and composition, concentration gradients within the films and on conductivity and hardness 141 . However so far, no clear model can be presented, but the high potential of PLD appeals for further investigations.…”

Section: Synthesismentioning

confidence: 99%

Processing of MAX phases: From synthesis to applications

2020

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MAX phases are well-known and established due to their unique combination of properties and versatility, but this family of materials has experienced several ups and downs during its short history, including even being referred to with different names. Extensive work was carried out in the early 1960s in Vienna (Austria) by Wolfgang Jeitschko and Hans Nowotny, who discovered in more than 100 new carbides and nitrides. 1 Among them, they reported a new class of ternary systems, based on a transition metal (M), a metalloid (Me), and carbon (C), with a similar crystal structure to carbon-stabilized β-manganese phase, that is, Mo 3 Al 2 C. They were classified as "H-Phases" due to their hexagonal crystal structure, and some compositions

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Pulsed laser deposition from a pre‐synthesized Cr₂AlC MAX phase target with and without ion‐beam assistance

Cited by 13 publications

References 51 publications

Growth, Properties, and Applications of Pulsed Laser Deposited Nanolaminate Ti3AlC2 Thin Films

Growth, Properties, and Applications of Pulsed Laser Deposited Nanolaminate Ti3AlC2 Thin Films

Synthesis and Characterization of New MAX Phase Alloys

Processing of MAX phases: From synthesis to applications

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Pulsed laser deposition from a pre‐synthesized Cr2AlC MAX phase target with and without ion‐beam assistance

Cited by 13 publications

References 51 publications

Growth, Properties, and Applications of Pulsed Laser Deposited Nanolaminate Ti3AlC2 Thin Films

Growth, Properties, and Applications of Pulsed Laser Deposited Nanolaminate Ti3AlC2 Thin Films

Synthesis and Characterization of New MAX Phase Alloys

Processing of MAX phases: From synthesis to applications

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Pulsed laser deposition from a pre‐synthesized Cr₂AlC MAX phase target with and without ion‐beam assistance