Pull-in study of an electrostatic torsion microactuator

Degani, Ofir; Socher, Eran; Lipson, Ariel; Lejtner, T.; Setter, D.J.; Kaldor, S.; Nemirovsky, Y.

doi:10.1109/84.735344

Cited by 226 publications

(149 citation statements)

References 12 publications

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“…Since this pull-in voltage is well above the breakthrough voltage of most semiconductor device, releasing process is not simulated because actual driving voltage will not be assigned so high. The simulated pull-in voltage here is much greater than the values presented by other literatures [38]. That is because the electrodes distance used for simulation (10 µm) is larger than that adopted by other design (~1 µm).…”

Section: Electrical-mechanical Couple Analysiscontrasting

confidence: 37%

Ultrasonic Transducers

2014

Ultrasonic Technology for Desiccant Regeneration

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Section: Electrical-mechanical Couple Analysiscontrasting

confidence: 37%

Ultrasonic Transducers

2014

Ultrasonic Technology for Desiccant Regeneration

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“…A lumped two degrees of freedom (L2DOF) pull-in model was presented in [10]. The pull-in parameters for electrostatic torsion actuators are the pull-in voltage and pull-in angle [11,12]. The pull-in phenomenon is widely applied in many micromachined devices that require bi-stability for their operation [13,14].…”

Section: Introductionmentioning

confidence: 99%

Casimir effect on the pull-in parameters of nanometer switches

Lin

2005

Microsystem Technologies

181

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Casimir effect on the critical pull-in gap and pull-in voltage of nanoelectromechanical switches is studied. An approximate analytical expression of the critical pull-in gap with Casimir force is presented by the perturbation theory. The corresponding pull-in parameters are computed numerically, from which one can notice the nonlinear effect of Casimir force on the pull-in parameters. The detachment length has been presented, which increases with increasing thickness of the beam. IntroductionThe nanoelectromechanical systems (NEMS), as an extension of microelectromechanical systems (MEMS), have turned into the hot research topic in recent years. In MEMS and NEMS, with the geometric dimension decreasing, the surface forces [1][2][3][4][5][6], replacing the body forces, take over the dominant position, which become more important for the nano-scales. In this paper, we just consider Casimir force and electrostatic force. Casimir [7] predicted an attractive force between objects. Kenneth et al. [8] have extended these considerations to real-world materials.NEM switches are fundament building blocks for the design of NEMS applications. However, the pull-in phenomenon, an inherent instability of MEM and NEM switches, is one of annoying problems in design. By applying a voltage difference between the two electrodes, an electrostatic force is formed. At certain voltage the switches lost its stability and the gap between the switches rapidly decrease, until the two electrodes adhere. The voltage and deformation of the switches at this state are referred to as the pull-in voltage and the critical pull-in gap respectively, or shortly as the pull-in parameters of switches. Therefore, an analytical expression of the pull-in parameters could guide the design.An analytical expression of the pull-in parameters has been given about the MEMS switches in [9]. A lumped two degrees of freedom (L2DOF) pull-in model was presented in [10]. The pull-in parameters for electrostatic torsion actuators are the pull-in voltage and pull-in angle [11,12]. The pull-in phenomenon is widely applied in many micromachined devices that require bi-stability for their operation [13,14]. In the above references [9][10][11][12][13][14], the Casimir and van der Waals effects are neglected. The significant effect of van der Waals force has been shown on the pull-in voltage of NEMS switches, but the effect on the critical pull-in gap has been omitted [15].The Casimir effect in MEMS was studied in [16] and measured in [17]. In [18], a micromachined torsional device is used to determine the Casimir effect in MEMS. Casimir force has a profound influence on the oscillatory behavior of nanostructures [19].The maximum length that will not stick to the substrate, also called detachment length is basic design parameter [20,21].The objective of the present paper is to study the effect of Casimir force on the pull-in parameters. An approximate analytical expression of the critical pull-in gap is obtained by the perturbation theory and the detachment length...

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“…2. The formula method is not applicable to a micromirror with sidewall electrodes because it assumes parallel plate capacitance (Degani et al 1998). The model calculations show that the pull-in voltage of micromirror with sidewall electrodes is smaller than that with bottom electrodes.…”

Section: Study Of Micromirror With Sidewall Electrodesmentioning

confidence: 99%

“…These capacitance values are then placed in ANSYS model for pull-in voltage analysis. Moreover, based on a paper by Degani et al (1998), we can calculate the pull-in voltage of micromirror with only bottom electrodes analytically. When calculating the a-scan pull-in voltage, the pull-in voltage is determined to be V apull-in ¼ 104.5323 V, and the b-scan pull-in voltage is V bpull-in ¼ 104.5323 V. All the pull-in analysis results are listed in Table 3.…”

Section: Study Of Micromirror With Sidewall Electrodesmentioning

confidence: 99%

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A Characteristic Study of Micromirror with Sidewall Electrodes

Bai

Yeow

Wilson

2007

International Journal of Optomechatronics

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A study of the characteristics of a micromirror with sidewall electrodes is presented. The static and dynamic performance of a micromirror with the addition of sidewall electrodes is improved over that of a micromirror with only bottom electrodes. The linear voltageto-angle property is still maintained under differential drive method and the drive voltage to achieve the same angular displacement is greatly reduced. The pull-in voltage is not changed significantly. In addition, our model demonstrates that undesired spring-softening effect that is commonly found in electrostatic actuation is significantly reduced. Analyses are based on both analytical model and FEM simulation.

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Pull-in study of an electrostatic torsion microactuator

Cited by 226 publications

References 12 publications

Ultrasonic Transducers

Ultrasonic Transducers

Casimir effect on the pull-in parameters of nanometer switches

A Characteristic Study of Micromirror with Sidewall Electrodes

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