Properties of transparent conductive ZnO:Al films prepared by co-sputtering

Oh, Byeong Yun; Jeong, Min Chang; Lee, Woong; Myoung, Jae Min

doi:10.1016/j.jcrysgro.2004.10.026

Cited by 110 publications

(53 citation statements)

References 19 publications

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“…They feature a wide band gap non-stoichiometric n-type semiconductor with a low resistivity and high transmittance in the visible region. Therefore, transparent conducting zinc oxide films are promising alternatives to ITO [1]. ZnO is used as a transparent conductor material in solar cells and is a promising material for transparent transistors, which can be used in a variety of consumer products [2][3][4].…”

Section: Introductionmentioning

confidence: 99%

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Effect of a hydrogen ratio in electrical and optical properties of hydrogenated Al-doped ZnO films

Tark

Kang

et al. 2008

J Electroceram

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This study examined the effect of the hydrogen ratio on the electrical and optical properties of hydrogenated Al-doped zinc oxide (AZO) thin films deposited by rf magnetron sputtering using a ceramic target (98 wt% ZnO, 2 wt% Al 2 O 3 ). Various AZO films on glass were prepared by changing the H 2 /(Ar+H 2 ) ratio at room temperature. The AZO/H films showed a lower resistivity and a higher carrier concentration and mobility than the AZO films. However, the resistivity and mobility of the AZO/H films increased and decreased with increasing H 2 flow ratio, respectively. As a result, the AZO/H films grown with 2% H 2 addition showed excellent electrical properties with a resistivity of 4.98 × 10 4 Ωcm. The UV-measurements showed that the optical transmission of the AZO/H films was >85% in the visible range with a wide optical band gap. In addition, the effect of H 2 flow ratio on the structure and composition of hydrogenated AZO thin films have also been studied.

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Section: Introductionmentioning

confidence: 99%

“…X-ray diffraction measurements of intrinsic biaxial compressive stress and c-axis lattice parameter for AZO films deposited at different H 2 flow ratio(1) …”

mentioning

confidence: 99%

Effect of a hydrogen ratio in electrical and optical properties of hydrogenated Al-doped ZnO films

Tark

Kang

et al. 2008

J Electroceram

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“…The ZnO is one of the most important functional metal oxides for their versatile practical applications, ranging from photodetector (Jun et al 2009), transparent electrode (Oh et al 2005), spintronic devices (Gupta et al 2008), surface acoustic wave devices (Krishnamoorthy and Iliadis 2008), and thin film gas sensors (Tang et al 2006), attributed to their outstanding properties such as wide direct optical band gap, large exciton binding energy, excellent chemical and thermal stability, and excellent piezoelectric properties (Gupta et al 2009). When the ZnO metal oxide is combined with CNT, it is marvelous that, the novel extraordinary properties of ZnO-CNT composite is appear.…”

Section: Introductionmentioning

confidence: 99%

Analysis on the effect of ZnO on Carbon nanotube by spray pyrolysis method

Ayeshamariam¹,

Saravanakkumar²,

Kashif

et al. 2016

Mech Adv Mater Mod Process

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“…Many authors have studied the RF sputtering of ZnO:Al target [10][11][12][13]. Unfortunately, only few studies reported on doping by simultaneous magnetron co-sputtering techniques [14], the most important advantage of this method is the control of the charges carrier concentrations.…”

Section: Introductionmentioning

confidence: 99%

Structural and opto-electrical properties of Al doped ZnO sputtered thin films

Laghfour

Ajjammouri

Aazou

et al. 2015

J Mater Sci: Mater Electron

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Transparent and conductive aluminum-doped zinc oxide (AZO) thin films with high preferential c-axis orientation have been deposited on glass substrates by radio frequency magnetron sputtering method of ZnO and DC magnetron sputtering of Al. Structural, surface morphology, optical and electrical properties of ZnO thin films were studied by X-ray diffraction, scanning electron microscope, ultraviolet-visible spectrophotometer, surface plasmon spectroscopy and Hall effect measurements. The results show that AZO films are polycrystalline and exhibit the hexagonal wurzite crystal structure with a preferred orientation along (002) direction. When DC sputtering power supplied to Al target increases, the crystallinity decreases while the electrical resistivity increases. The average measured transmittance exceeded 75 % in the visible range for all AZO thin films. The band gap values increase with decreasing the Al concentrations.

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Properties of transparent conductive ZnO:Al films prepared by co-sputtering

Cited by 110 publications

References 19 publications

Effect of a hydrogen ratio in electrical and optical properties of hydrogenated Al-doped ZnO films

Effect of a hydrogen ratio in electrical and optical properties of hydrogenated Al-doped ZnO films

Analysis on the effect of ZnO on Carbon nanotube by spray pyrolysis method

Structural and opto-electrical properties of Al doped ZnO sputtered thin films

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