Progress of Waveguide Ring Resonators Used in Micro-Optical Gyroscopes

Feng, Zuo; He, Yuming; Yan, Wei; Yang, Fuhua; Han, Wei; Li, Zhaofeng

doi:10.3390/photonics7040096

Cited by 10 publications

(3 citation statements)

References 62 publications

(79 reference statements)

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“…where 𝐴 and 𝐿 denote the effective area and length enclosed by the closed optical loop, respectively, 𝑐 is the speed of light in vacuum, Ω is the rotational angular velocity, 𝑘 is the wave vector, 𝜆 is the operating wavelength, 𝑅 is radius of the closed loop, and △ 𝑆 represents the optical path change caused by rotation. The optical signal detected by the photodetector is the result of interference between two beams of light propagating in opposite directions [38]. The optical power of the light emitted from the source after passing through the spiral waveguide and reaching the two photodetectors can be expressed by the following expression:…”

Section: Model and Theorymentioning

confidence: 99%

An Ultra-Low-Loss Waveguide Based on BIC Used for an On-Chip Integrated Optical Gyroscope

Yuan

Chen

et al. 2023

Photonics

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The development of integrated optical technology and the continuous emergence of various low-loss optical waveguide materials have promoted the development of low-cost, size, weight, and power optical gyroscopes. However, the losses in conventional optical waveguide materials are much greater than those in optical fibers, and different waveguide materials often require completely different etching processes, resulting in severely limited gyroscope performance, which is not conducive to the monolithic integration of gyroscope systems. In this paper, an ultra-low-loss Archimedean spiral waveguide structure is designed for an on-chip integrated optical gyroscope by using the high Q value and low-loss optical characteristics of the bound state in the continuum (BIC). The structure does not require the etching of high-refractive-index optical functional materials, avoiding the etching problem that has been difficult to solve for a long time. In addition, the optical properties of the BIC straight and the BIC bent waveguide are simulated using the finite element method (FEM) to find the waveguide structural parameters corresponding to the BIC mode, which is used to design the integrated sensing coil and analyze the gyroscope performance. The simulation results show that the gyroscope’s sensitivity can reach 0.6699°/s. This research is the first time a BIC optical waveguide has been used for an integrated optical gyroscope, providing a novel idea for the monolithic integration of optical gyroscopes.

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Section: Model and Theorymentioning

confidence: 99%

An Ultra-Low-Loss Waveguide Based on BIC Used for an On-Chip Integrated Optical Gyroscope

Yuan

Chen

et al. 2023

Photonics

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“…The interferometric ring inside the IFOG has two counterpropagating light beams with the same frequency, which will generate a phase difference as the IFOG rotates with the system, from which the angular velocity can be deduced. A longer interferometric ring is able to sense slighter motion, meaning a higher sensitivity of the gyroscope, but the resulting larger size limits further widespread applications [8][9][10]. With the development of optoelectronic and micro/nano processing technology, the miniaturization of optical gyroscopes became a major subject, and the micro-optical gyroscope (MOG) was launched [11,12].…”

Section: Introductionmentioning

confidence: 99%

Inductively Coupled Plasma Dry Etching of Silicon Deep Trenches with Extremely Vertical Smooth Sidewalls Used in Micro-Optical Gyroscopes

Zhang

Sun³

et al. 2023

Micromachines

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Micro-optical gyroscopes (MOGs) place a range of components of the fiber-optic gyroscope (FOG) onto a silicon substrate, enabling miniaturization, low cost, and batch processing. MOGs require high-precision waveguide trenches fabricated on silicon instead of the ultra-long interference ring of conventional F OGs. In our study, the Bosch process, pseudo-Bosch process, and cryogenic etching process were investigated to fabricate silicon deep trenches with vertical and smooth sidewalls. Different process parameters and mask layer materials were explored for their effect on etching. The effect of charges in the Al mask layer was found to cause undercut below the mask, which can be suppressed by selecting proper mask materials such as SiO2. Finally, ultra-long spiral trenches with a depth of 18.1 μm, a verticality of 89.23°, and an average roughness of trench sidewalls less than 3 nm were obtained using a cryogenic process at −100 °C.

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“…Another MEMS application is the accelerometer-based optical modulator using MZI was presented [9], which was fabricated on silicon-oninsulator, where one branch of MZI is fixed, and another branch uses a floating waveguide. The waveguide-based MZI and gyroscope were already designed and presented [21][22]. Other forms of MEMS and interferometers have been proposed, where Arumona et al [23] have proposed the use of microring resonator embedded Farby-Perot interferometer, which can be useful for sensing applications, especially for nano/micro-scale measurement regimes.…”

Section: Introductionmentioning

confidence: 99%

Distributed MEMS Sensors Using Plasmonic Antenna Array Embedded Sagnac Interferometer

et al. 2022

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A micro Sagnac interferometer is proposed for electron cloud distributed sensors formed by an integrated (micro-electro-mechanical systems) MEMS resonator structure. The Sagnac interferometer consists of four microring probes integrated into a Sagnac loop. Each of the microring probes is embedded with the silver bars to form the plasmonic wave oscillation. The polarized light of 1.50µm wavelength is input into the interferometer, which is polarized randomly into upstream and downstream directions. The polarization outputs can be controlled by the space-time input at the Sagnac port. Electrons are trapped and oscillated by the whispering gallery modes (WGMs), where the plasmonic antennas are established and applied for wireless fidelity (WiFi) and light fidelity (LiFi) sensing probes, respectively. Four antenna gains are 2.59dB, 0.93dB, 1.75dB, and 1.16dB, respectively. In manipulation, the sensing probe electron densities are changed by input source power variation. When the electron cloud is excited by the microscopic medium, where the change in electron density is obtained and reflected to the required parameters. Such a system is a novel device that can be applied for brain-device interfering with the dual-mode sensing probes. The obtained WGM sensors are 1.35µm -2 , 0.90µm -2 , 0.97µm -2 and, 0.81µm -2 , respectively. The WGMs behave as a four-point probe for the electron cloud distributed sensors, where the electron cloud sensitivities of 2.31prads -1 mm 3 (electrons) -1 , 2.27prads -1 mm 3 (electrons) -1 , 2.22prads -1 mm 3 (electrons) -1 , 2.38prads -1 mm 3 (electrons) -1 are obtained, respectively.

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Progress of Waveguide Ring Resonators Used in Micro-Optical Gyroscopes

Cited by 10 publications

References 62 publications

An Ultra-Low-Loss Waveguide Based on BIC Used for an On-Chip Integrated Optical Gyroscope

An Ultra-Low-Loss Waveguide Based on BIC Used for an On-Chip Integrated Optical Gyroscope

Inductively Coupled Plasma Dry Etching of Silicon Deep Trenches with Extremely Vertical Smooth Sidewalls Used in Micro-Optical Gyroscopes

Distributed MEMS Sensors Using Plasmonic Antenna Array Embedded Sagnac Interferometer

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