Preparation of nano-scale titania thick film and its oxygen sensitivity

Gao, Lian; Li, Q; Song, Zhiming; Wang, J

doi:10.1016/s0925-4005(00)00612-2

Cited by 53 publications

(26 citation statements)

References 6 publications

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“…Recently, Gao et al, as well as Sharma and Bhatnagar, reported optimal sensitivity values of 1.43 and 30, respectively, for undoped-titania oxygen sensors at their operating temperature ranges. [28,29] The latter study also reported an optimal response time of 8 s achieved at 600 C, which is significantly less than that for the present study. Future research will focus on reducing the response time.…”

Section: Resultscontrasting

confidence: 76%

Facile Fabrication and Integration of Patterned Nanostructured TiO2 for Microsystems Applications

Zuruzi¹,

MacDonald²

2005

Adv. Funct. Mater.

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A simple technique to fabricate integrated crack‐free and crystalline nanostructured titania (ns‐titania) in microsystems devices is presented. In this technique, crack elimination is achieved by oxidizing Ti films, pre‐patterned below a threshold dimension, in aqueous hydrogen peroxide solution. Amorphous ns‐titania with walls of pores having thicknesses and pore diameters ranging from 25 nm–50 nm and 50 nm–200 nm, respectively, is formed after oxidation and transformed to anatase after thermal annealing. We demonstrate the functionality of ns‐titania formed and compatibility of this technique with microsystems device manufacturing practices by fabricating a prototype device for gas sensing using integrated ns‐titania features as sensing elements.

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Section: Resultscontrasting

confidence: 76%

Facile Fabrication and Integration of Patterned Nanostructured TiO2 for Microsystems Applications

Zuruzi¹,

MacDonald²

2005

Adv. Funct. Mater.

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“…25,26 Optimal sensitivity of NST-based sensor ͑60 at 523 K͒ is superior to those of undoped-titania based sensors reported. Sharma et al and Gao et al reported sensitivity values of 1.43 and ϳ30 at higher operating temperatures 25,26,28 -these values would reduce accordingly at 523 K. In addition, an important advantage of the present approach is minimal drift with time of electrical properties of NST-based sensors. This could be due to the high crystallinity of NST formed as indicated by SAED studies.…”

Section: Moskovitsmentioning

confidence: 80%

Highly sensitive gas sensor based on integrated titania nanosponge arrays

Zuruzi

Kolmakov

MacDonald

et al. 2006

Applied Physics Letters

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Highly sensitive gas sensors were fabricated using nanostructured titania pad arrays. Nanostructured titania (NST) formed is sponge-like consisting of interconnected nanoscale wires and walls, which are made up of anatase nanocrystals. Electrical characterization indicates that contacts were ohmic and NST was highly sensitive to O2. Variations of hundreds of oxygen molecules over a 20μm NST square pad sensing element were detected at 250°C. The NST-based sensor operates at lower temperatures, has fast response time, and superior sensitivity relative to oxygen sensors based on porous undoped titania reported in the literature.

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“…A microemulsion method has been successfully employed to produce oxide nanoparticles, which further enhance the sensitivity of the semiconductive gas sensors [6]. The essential feature of this technique is to restrict reactions inside the so-called nanoreactors of reverse micelles that control the final size of the particles.…”

Section: Introductionmentioning

confidence: 99%