Preparation and Characterization of FC Films Coated on PET Substrates by RF Magnetron Sputtering

Abstract

Abstract. Fluorocarbon (FC) films were prepared on polyethylene terephthalate (PET) plates and PET fabrics respectively by a radiofrequency (RF) magnetron sputtering technique using polytetrafluoroethylene (PTFE) as a target. Scanning electron microscope and X-ray photoelectron spectroscopy were used to investigate the morphology, structure and composition of the obtained FC films. The hydrophobicity and uvioresistant properties of the FC film coated fabric were studied. The results show that the FC films were successfully deposited on the PET substrates by a RF magnetron sputtering. The deposited films are made up of four components -CF3, -CF2-, CF-and -C-. The proportions of the four components and surface morphologies of the deposited films vary with the sputtering conditions. Compared with the original fabric samples, the hydrophobicity of the FC film coated fabrics is quite good and improved significantly.