On-chip waveguide sensors are potential candidates for
deep-space
exploration because of their high integration and low power consumption.
Since the fundamental absorption of most gas molecules exists in the
mid-infrared (e.g., 3–12 μm), it is of great significance
to fabricate wideband mid-infrared sensors with high external confinement
factor (ECF). To overcome the limited transparency window and strong
waveguide dispersion, a chalcogenide suspended nanorib waveguide sensor
was proposed for ultra-wideband mid-infrared gas sensing, and three
waveguide sensors (WG1–WG3) with optimized
dimensions exhibit a wide waveband of 3.2–5.6 μm, 5.4–8.2
μm, and 8.1–11.5 μm with exceptionally high ECFs
of 107–116%, 107–116%, and 116–128%, respectively.
The waveguide sensors were fabricated by a two-step lift-off method
without dry etching to reduce the process complexity. Experimental
ECFs of 112%, 110%, and 110% were obtained at 3.291 μm, 4.319
μm, and 7.625 μm, respectively, through methane (CH4) and carbon dioxide (CO2) measurements. A limit
of detection of 5.9 ppm was achieved for an averaging time of 64.2
s through the Allan deviation analysis of CH4 at 3.291
μm, leading to a comparable noise equivalent absorption sensitivity
of 2.3 × 10–5 cm–1 Hz–1/2 as compared to the hollow-core fiber and on-chip
gas sensors.