Porous silicon multilayer optical waveguides

Loni, A.; Canham, Leigh; Berger, M.; Arens-Fischer, R.; Münder, H.; Lüth, H.; Arrand, H.F.; Benson, T.M.

doi:10.1016/0040-6090(95)08075-9

Cited by 202 publications

(96 citation statements)

References 7 publications

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“…Here, the influence of core size change from 2 to 3 m on propagation loss is relatively small [14]. Currently our losses are much better than 5 -10 dB/ cm reported for PS waveguides [3,4].…”

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confidence: 67%

“…This approach has already been used to form multilayer planar waveguides [2,3], strip-rib waveguides [3], or buried waveguides [4]. However, a relatively high loss of 5 -10 dB/ cm is obtained for these waveguides owing to absorption and interface scattering [2][3][4]. Oxidation can be used to improve the loss, but this reduces the refractive index contrast between the core and cladding and limits its use for applications that require tight confinement of light such as integrated photonics circuits.…”

mentioning

confidence: 99%

“…Waveguides can be grown to produce a low-highlow refractive index profile. This approach has already been used to form multilayer planar waveguides [2,3], strip-rib waveguides [3], or buried waveguides [4]. However, a relatively high loss of 5 -10 dB/ cm is obtained for these waveguides owing to absorption and interface scattering [2][3][4].…”

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confidence: 99%

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Fabrication of low-loss silicon-on-oxidized-porous-silicon strip waveguide using focused proton-beam irradiation

et al. 2009

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We have successfully fabricated low-loss silicon-on-oxidized-porous-silicon (SOPS) strip waveguides with high-index contrast using focused proton-beam irradiation and electrochemical etching. Smooth surface quality with rms roughness of 3.1 nm is achieved for a fluence of 1 ϫ 10 15 /cm 2 after postoxidation treatment. Optical characterization at a wavelength of 1550 nm shows a loss of 1.1± 0.4 dB/ cm and 1.2± 0.4 dB/ cm in TE and TM polarization respectively, which we believe is the lowest reported loss for SOPS waveguides. This opens up new opportunities for all-silicon-based optoelectronics applications.

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confidence: 67%

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confidence: 99%

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Fabrication of low-loss silicon-on-oxidized-porous-silicon strip waveguide using focused proton-beam irradiation

et al. 2009

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“…Potential applications include dye-sensitized solar cells [8][9][10], low-k dielectric materials [11,12], photocatalysis [13,14], biosensors [15][16][17], optoelectronics [18][19][20], and antireflecting and self-cleaning coatings [21], to name a few. In these applications, predicting the effects of porosity and pore shape, size, and spatial arrangement on the optical and dielectric properties is essential to the design of mesoporous materials with desired performances or for material characterization purposes.…”

Section: Introductionmentioning

confidence: 99%

Effective optical properties of highly ordered mesoporous thin films

et al. 2010

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This paper expands our previous numerical studies predicting the optical properties of highly ordered mesoporous thin films from two-dimensional (2D) nanostructures with cylindrical pores to three-dimensional (3D) structures with spherical pores. Simple, face centered, and body centered cubic lattice of spherical pores and hexagonal lattice of cylindrical pores were considered along with various pore diameter and porosity. The transmittance and reflectance were numerically computed by solving 3D Maxwell's equations for transverse electric and transverse magnetic polarized waves normally incident on the mesoporous thin films. The effective optical properties of the films were determined by an inverse method. Reflectance of 3D cubic mesoporous thin films was found to be independent of polarization, pore diameter, and film morphology and depended only on film thickness and porosity. By contrast, reflectance of 2D hexagonal mesoporous films with cylindrical pores depended on pore shape and polarization. The unpolarized reflectance of 2D hexagonal mesoporous films with cylindrical pores was identical to that of 3D cubic mesoporous films with the same porosity and thickness. The effective refractive and absorption indices of 3D films show good agreement with predictions by the 3D Maxwell-Garnett and Nonsymmetric Bruggeman effective medium approximations, respectively.

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“…[1][2][3][4] Potential applications include dye-sensitized solar cells, [5][6][7] low-k dielectric materials, 8,9 biosensors, [10][11][12] and optical devices including waveguides, [13][14][15] Bragg reflectors and Fabry-Perot filters. [16][17][18][19][20][21][22] For example, in order to confine and propagate electromagnetic waves within a waveguide, the guide region itself must have a higher index of refraction than the surrounding cladding.…”

Section: Introductionmentioning

confidence: 99%

Effective optical properties of absorbing nanoporous and nanocomposite thin films

Garahan

Pilon

Yin

et al. 2007

Journal of Applied Physics

115

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This paper aims at developing numerically validated models for predicting the through-plane effective index of refraction and absorption index of nanocomposite thin films. First, models for the effective optical properties of such materials are derived from previously reported analysis applying the volume averaging theory (VAT) to Maxwell’s equations. The transmittance and reflectance of nanoporous thin films are computed by solving Maxwell’s equations and the associated boundary conditions at all interfaces using finite element methods. The effective optical properties of the films are retrieved by minimizing the root mean square of the relative errors between the computed and theoretical transmittance and reflectance. Nanoporous thin films made of SiO2 and TiO2 consisting of cylindrical nanopores and nanowires are investigated for different diameters and various porosities. Similarly, electromagnetic wave transport through dielectric medium with embedded metallic nanowires are simulated. The numerical results are compared with predictions from widely used effective property models including (1) the Maxwell-Garnett theory, (2) the Bruggeman effective medium approximation, (3) the parallel, (4) series, (5) Lorentz-Lorenz, and (6) the VAT models. Very good agreement is found with the VAT model for both the effective index of refraction and absorption index. Finally, the effect of volume fraction on the effective index of refraction and absorption index predicted by the VAT model is discussed. For certain values of wavelengths and volume fractions, the effective index of refraction or absorption index of the composite material can be smaller than that of both the continuous and dispersed phases. These results indicate guidelines for designing nanocomposite materials with desired optical properties.

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Porous silicon multilayer optical waveguides

Cited by 202 publications

References 7 publications

Fabrication of low-loss silicon-on-oxidized-porous-silicon strip waveguide using focused proton-beam irradiation

Fabrication of low-loss silicon-on-oxidized-porous-silicon strip waveguide using focused proton-beam irradiation

Effective optical properties of highly ordered mesoporous thin films

Effective optical properties of absorbing nanoporous and nanocomposite thin films

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