2009 11th Electronics Packaging Technology Conference 2009
DOI: 10.1109/eptc.2009.5416408
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Polymer optical waveguide fabrication using laser ablation

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Cited by 16 publications
(19 citation statements)
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References 14 publications
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“…1, which is similar to that previously detailed [25]. In brief, it consisted of cleaning (in water and alcohol, either methanol or iso-propanol) and drying the FR4 substrates to remove debris and contaminant.…”
Section: Fabricationmentioning
confidence: 99%
“…1, which is similar to that previously detailed [25]. In brief, it consisted of cleaning (in water and alcohol, either methanol or iso-propanol) and drying the FR4 substrates to remove debris and contaminant.…”
Section: Fabricationmentioning
confidence: 99%
“…A single layer of waveguide fabrication is common as this is currently enough to provide the data rate requirements for OI, but a multilayer waveguide has also been demonstrated [Hendrickx, et al, 2007a[Hendrickx, et al, , 2007bMatsuoka, et al, 2010]. Multimode waveguides are also common; dimensions such as 20 µm × 20 µm, 30 µm × 30 µm, 35 µm × 35 µm, 45 µm × 45 µm, 50 µm × 50 µm, 50 µm × 20 µm, 70 µm × 70 µm, 75 µm × 75 µm, 85 µm × 100 µm have already been reported [Albrecht, et al, 2005;Bamiedakis, et al, 2007;Dangel, et al, 2004;Immonen, et al, 2005Immonen, et al, , 2007Liang, et al, 2008;Tooley, et al, 2001;Van Steenberge, et al, 2004;Zakariyah, 2009, Zakariyah, et al, 2011. Two or more adjacent waveguides with a pitch of 250 µm [Albrecht, et al, 2005;Horst, 2009;Hwang, et al, 2010;Kim, et al, 2007;Van Steenberge, et al, 2004] is preferred as it is the pitch used for Vertical Cavity Surface Emitting Lasers (VCSEL) and photodector arrays, but other pitch sizes such as 80 µm [Dangel, et al, 2007], 100 µm [Dangel, et al, 2004] and 125 µm [Matsuoka, et al, 2010;Van Steenberge, et al, 2006] www.intechopen.com relatively short, loss due to multimode is acceptable and that alignment between various optical components would be relaxed.…”
Section: Deposition Of Optical Polymermentioning
confidence: 99%
“…Following the method used for CO 2 laser [10], P eging et al selected UV uences below the ablation threshold of PMMA. Another study conducted by Zakariyah et al [11] showed good surface characteristics of excimer laser compared to 355 nm UV Nd:YAG and 10.6 μm CO 2 lasers.…”
Section: Introductionmentioning
confidence: 99%
“…e former reduces the thermal di usivity of the surface while the latter provides high-energy pulses. Furthermore high machining quality and ablation threshold are related to the pulse width duration of excimer laser [11]. Typical operating wavelengths of excimer lasers used for machining polymer materials especially for fabrication of optical waveguides are 193 nm (with ArF) and 248 nm (with KrF) [12].…”
Section: Introductionmentioning
confidence: 99%
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