Polishing damages to electrical properties of BLT thin film capacitors fabricated by damascene process of chemical mechanical polishing

Kim, Nam Hoon; Jung, Pan-Gum; Ko, Pil Ju; Lee, Woo-Sun

doi:10.1109/isaf.2008.4693730

2008 17th IEEE International Symposium on the Applications of Ferroelectrics 2008

DOI: 10.1109/isaf.2008.4693730

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Polishing damages to electrical properties of BLT thin film capacitors fabricated by damascene process of chemical mechanical polishing

Nam Hoon Kim

Pan-Gum Jung

Pil Ju Ko

et al.

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Polishing damages to electrical properties of BLT thin film capacitors fabricated by damascene process of chemical mechanical polishing

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References 3 publications

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