Plasma production by helicon waves

Shoji, T.; Sakawa, Y.; Nakazawa, S.; Kadota, K.; Sato, Teruyuki

doi:10.1088/0963-0252/2/1/002

Cited by 171 publications

(110 citation statements)

References 13 publications

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“…A four-point central differencing scheme, 26 which has an order of accuracy of (⌬z) 4 , is used when calculating the derivative of the phase with respect to the axial position z. These k z values are used to evaluate the kinetic form of the dielectric element P of the plasma dielectric tensor.…”

Section: Axϭb ͑25͒mentioning

confidence: 99%

“…Despite the substantial experimental interest in these sources, [1][2][3][4][5][6][7][8] no detailed two-dimensional (r,z) plasma profile wave simulations have been carried out to date to better model and understand propagation and absorption mechanisms. Several one-dimensional models that assume radially nonuniform plasma density and temperature profiles and axially uniform applied magnetic field and plasma density, have been presented in the literature.…”

Section: Introductionmentioning

confidence: 99%

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Wave propagation and absorption simulations for helicon sources

Mouzouris

Scharer

1998

Physics of Plasmas

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A two-dimensional ͑2-D͒, finite-difference computer code is developed to examine helicon antenna coupling, wave propagation, collisionless Landau, and collisional heating mechanisms. The code calculates the electromagnetic wave fields and power absorption in an inhomogeneous, cold, collisional plasma. The current distribution of the launching antenna, which provides the full antenna spectra, is included in the model. An iterative solution that incorporates warm plasma thermal effects has been added to the code to examine the contribution of collisionless ͑Landau͒ wave absorption by electrons. Detailed studies of the wave fields and electron heating profiles at low magnetic fields (B 0 Ͻ100 G), where both Trivelpiece-Gould ͑TG͒ and helicon ͑H͒ modes are present, are discussed. The effects of the applied uniform magnetic field (B 0 ϭ10-1000 G), 2-D (r,z) density profiles (n e0 ϭ10 11 -10 13 cm Ϫ3 ), neutral gas pressures of 1-10 mTorr and the antenna spectrum on collisional and collisionless wave field solutions and power absorption are investigated. Cases in which the primarily electrostatic ͑TG͒ surface wave dominates the heating and the power is absorbed near the edge region and cases in which the propagating helicon wave transports and deposits its energy in the core plasma region are examined.

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Section: Axϭb ͑25͒mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Wave propagation and absorption simulations for helicon sources

Mouzouris

Scharer

1998

Physics of Plasmas

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“…To verify that helicon waves are indeed excited in rf discharges of this type, various workers have measured the wave fields with magnetic probes [2,11]. Comparison with theory, however, was inexact, since the theory was done for uniform plasmas whereas the plasmas had radially varying densities.…”

Section: Introductionmentioning

confidence: 99%

“…Boswell et al [2] have used straight antennas, which correspond to plane polarization; and Shoji et al [11] have used left and right helical antennas, which correspond to circular polarization. In the data presented in Sec.…”

Section: Introductionmentioning

confidence: 99%

Helicon wave excitation with helical antennas

1995

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Components of the wave magnetic field in a helicon discharge have been measured with a single-turn, coaxial magnetic probe. Left- and right-handed helical antennas, as well as plane-polarized antennas, were used; and the results were compared with the field patterns computed for a nonuniform plasma. The results show that the right-hand circularly polarized mode is preferentially excited with all antennas, even those designed to excite the left-hand mode. For right-hand excitation, the radial amplitude profiles are in excellent agreement with computations.

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“…Over the past decade there has been increasing interest in helicon wave discharges because they have been shown [1][2][3][4][5][6][7] to produce high density plasmas (n > 10 12 cm -3 ) with relatively small amounts of RF power (P rf ≤ 3kW). Theoretical treatments [8,9] of this discharge have been done using the well developed theory of waves in a bounded plasma, giving several scaling laws to which experimental data are fit.…”

Section: Introductionmentioning

confidence: 99%

2D imaging of a helicon discharge

Blackwell

Chen²

1997

IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science

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Two-dimensional images of the ionized argon light of a helicon discharge are made both along and across the magnetic field with various antenna configurations. Two antennas, a Nagoya Type III and a helical antenna, are used to create a magnetized RF plasma with density in the range n ≤ 5 × 10 13 cm -3 . A CCD camera with a 488nm bandpass filter is used to image the plasma as magnetic field and power are changed. By inserting a Faraday shield, it is demonstrated that the inductive component of the antenna coupling is responsible for producing high density plasmas. Asymmetries in the plasma profile are shown to be caused primarily by capacitive coupling, with the purely inductively coupled plasmas being symmetric and centrally peaked. Numerical calculations of antenna coupling show that the configurations having the largest antenna loading correspond to the brightest plasmas observed in the experiment, with the m = +1 mode being the most strongly coupled.

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Plasma production by helicon waves

Cited by 171 publications

References 13 publications

Wave propagation and absorption simulations for helicon sources

Wave propagation and absorption simulations for helicon sources

Helicon wave excitation with helical antennas

2D imaging of a helicon discharge

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