1998
DOI: 10.1002/(sici)1099-0518(19980915)36:12<2043::aid-pola10>3.0.co;2-6
|Get access via publisher |Summarize |Cite
Plasma polymerization of fluoromethanes
Abstract: Methane and fluoromethanes (CHnF4−n, 1 ≤ n ≤ 3) were subjected to an rf glow discharge plasma. All the fluoromethanes (including methane) polymerized in the plasma and formed thin films. The deposition rate of the fluoromethanes depended on their monomer structure: CH2F2, of which the F/H ratio is unity, showed the greatest deposition rate. The elimination of H and F atoms as H—F was found to be a key factor for the polymerization of fluoromethanes. The chemical composition of the polymerized film, measured wi…
Search citation statements
Paper Sections
Select...
6
1
0
0
Citation Types
0
1
0
0
Year Published
2004
2014
Publication Types
Select...
6
1
Relationship
0
7
Authors
Journals
Cited by 7 publications
(1 citation statement)
References 19 publications
0
1
0
0
“…Plasma polymerization is a suitable technique for depositing a thin film with widespread applications in the domains of biomedicine [130], biofouling [131], anticorrosion [132] and anti-icing [133]. In this part of the study, a superhydrophobic coating is developed by using the plasma polymerization method.…”
Section: Introductionmentioning
confidence: 99%
“…Plasma polymerization is a suitable technique for depositing a thin film with widespread applications in the domains of biomedicine [130], biofouling [131], anticorrosion [132] and anti-icing [133]. In this part of the study, a superhydrophobic coating is developed by using the plasma polymerization method.…”
Section: Introductionmentioning
confidence: 99%
