Plasma-assisted techniques for growing hard nanostructured coatings

Pessoa, Rodrigo Sávio; Fraga, Mariana Amorim; Santos, L.V.; Galvão, Nierlly Karinni de Almeida Maribondo; Maciel, Homero Santiago; Massi, M.

doi:10.1016/b978-0-85709-211-3.00018-2

Cited by 12 publications

(10 citation statements)

References 73 publications

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“…Different surface engineering technologies, particularly coating processing options, such as electroplating and electroless technologies, thermal spray, microwave cladding, friction stir processing, plasma‐assisting technology, PVD, CVD, and some others can be basically considered and employed for steel protection by hard layers. Ceramic (oxide and non‐oxide) or composite protective layers (e.g., CMC, MMC, and DLC) have higher potential 124–136 . However, many of the listed options are not well suited for industrial applications in mining and mineral processing, either because they cannot withstand severe abrasive and erosive conditions required by the industry, or because they are not applicable for the inner surface protection of long tubing and complex shape components.…”

Section: Major Advanced Ceramic Composite or Coating Materials For Pr...mentioning

confidence: 99%

Advanced ceramics and coatings for erosion‐related applications in mineral and oil and gas production: A technical review

Medvedovski¹

2022

Int J Applied Ceramic Tech

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The applications of advanced ceramics, composites and coatings in mineral, mining, fuel production, and processing are reviewed. The materials include oxide and non‐oxide ceramics (specifically SiC‐based), ceramic–ceramic, and ceramic–metal composites, coatings on metallic components where functional application properties can be achieved. Some principles of materials selection, specifically for erosion wear and corrosion applications, and manufacturing are considered. The examples of the successful development and processing of ceramics, coatings, and composites with manageable structures and phase compositions, in the erosion‐related applications, particularly conducted by the author, are discussed and reviewed. Specifically, industrially employed types of ceramics and processing routes were focused on the considered applications. Particular demands for advanced materials with high reliability and complex shapes or for protective coatings on complex shape steel components and long tubing with inner surface protection require novel and optimized processing. The factors affecting erosion and erosion–corrosion resistance and the paths for the erosion resistance enhancement of ceramic and coating materials are considered. Ceramic components design, technology, and installation features are reviewed.

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Section: Major Advanced Ceramic Composite or Coating Materials For Pr...mentioning

confidence: 99%

Advanced ceramics and coatings for erosion‐related applications in mineral and oil and gas production: A technical review

Medvedovski¹

2022

Int J Applied Ceramic Tech

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“…In PECVD of SiC films, methane (CH 4 ) and silane (SiH 4 ) are commonly used as carbon and silicon precursors, respectively [ 80 ]. In addition, the synthesis of PECVD SiC films using a single precursor, such as DSB, methylsilane, MTS, or HMDS, have also been reported [ 26 , 81 , 82 , 83 ]. Due to the importance of SiC produced by PECVD, a recent theoretical study discussed the reaction of various silicon and carbon precursors with bare 3C-SiC (011) surfaces (where silicon and carbon atoms are exposed) and H-terminated 3C-SiC (011) surfaces and how silane plasma fragments react with H-Si and H-C bonds of the H-terminated 3C-SiC (011) surfaces [ 84 ].…”

Section: Chemical Vapor Synthesis Of Sic Films: From Cvd To Aldmentioning

confidence: 99%

“…In this context, extensive research has been done on growth of SiC-based films at low- or high-temperature CVD processes aiming to produce high-quality films for application not only in the field of MEMS, but also for hard coatings [ 83 ], biotechnology [ 117 ], chemical sensors [ 116 ], and other electronic applications. At high-temperature CVD processes (>500 °C [ 8 ]), we can cite the APCVD, LPCVD, and MOCVD methods.…”

Section: Cvd-based Sic Requirements For Development Of Mems/nems Dmentioning

confidence: 99%

Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS

Fraga

Pessoa

2020

Micromachines

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A search of the recent literature reveals that there is a continuous growth of scientific publications on the development of chemical vapor deposition (CVD) processes for silicon carbide (SiC) films and their promising applications in micro- and nanoelectromechanical systems (MEMS/NEMS) devices. In recent years, considerable effort has been devoted to deposit high-quality SiC films on large areas enabling the low-cost fabrication methods of MEMS/NEMS sensors. The relatively high temperatures involved in CVD SiC growth are a drawback and studies have been made to develop low-temperature CVD processes. In this respect, atomic layer deposition (ALD), a modified CVD process promising for nanotechnology fabrication techniques, has attracted attention due to the deposition of thin films at low temperatures and additional benefits, such as excellent uniformity, conformability, good reproducibility, large area, and batch capability. This review article focuses on the recent advances in the strategies for the CVD of SiC films, with a special emphasis on low-temperature processes, as well as ALD. In addition, we summarize the applications of CVD SiC films in MEMS/NEMS devices and prospects for advancement of the CVD SiC technology.

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“…-High-purity sources can be used. The three most common PVD coating approaches, where (a) shows a vacuum deposition process [158], (b) illustrates a schematic drawing of the ion-plating method [159], and (c) demonstrates the physical sputtering processes [160]. Reproduced with permission from [160].…”

Section: Vacuum Depositionmentioning

confidence: 99%

Solid Particle Erosion Behaviour and Protective Coatings for Gas Turbine Compressor Blades—A Review

et al. 2020

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Gas turbines (GTEs) are often utilised in harsh environments where the GT components, including compressor vanes and rotor blades, are subject to erosion damage by sand and dust particles. For instance, in a desert environment, the rate of damage made by solid particles erosion (SPE) becomes severe, and therefore results in degradation to the GTE parts, lowering the cycle efficiency, reducing the device lifetime, and increasing the overall cost of the operation. As such, understanding the erosion mechanism caused by solid particles and the effects associated with it is crucial for selecting the appropriate countermeasures and maintaining the system performance. This review paper provides a survey of the available studies on SPE effects on GTEs and surface protective coatings. Firstly, the ductile and brittle SPE mechanism is presented, as well as the ductile-brittle transition region. Then, an in-depth focus on the parameters associated with the SPE, such as particles properties and impingement conditions, is introduced. Furthermore, the existing theoretical models are shown and discussed. Afterwards, erosion resistant coating materials for surface protection and their selection criteria are covered in the review. Finally, the gap in knowledge and future research direction in the field of SPE on GTEs are provided.

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Plasma-assisted techniques for growing hard nanostructured coatings

Cited by 12 publications

References 73 publications

Advanced ceramics and coatings for erosion‐related applications in mineral and oil and gas production: A technical review

Advanced ceramics and coatings for erosion‐related applications in mineral and oil and gas production: A technical review

Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS

Solid Particle Erosion Behaviour and Protective Coatings for Gas Turbine Compressor Blades—A Review

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