Piezoelectric flow control system based on microfluidic chip

Abstract

We demonstrated an integrated piezoelectric flow control system combined with microfabrication technology and piezoelectric actuation. In this system, the microchip is made of PDMS using soft lithography and standard replica molding techniques. Incorporated with piezoelectric actuator, the device achieve the automatic flow control with low voltage varying from 10V to 30V at adjustable frequency ranging from 1 Hz to 1 kHz.