J.-O. Choi, J. C. Rosenfeld, J. A. Tyrell, J. H. Yang, S. R. Rojstaczer, S. Jeng
Photosensitive polyamic acid involving substituted 3, 5‐diaminobenzamide has been developed for photopatternable polyimidesiloxanes. This precursor, formulated with photosensitizers, was used to develop fine patterns by i‐line UV exposure. The curing of polyamic acid was investigated by using FTIR and physical property measurement. The cured film has a high glass transition temperature depending on the siloxane content. It is stable up to 400°C and loses some of the substituted groups on heating to 5…
scite is a Brooklyn-based startup that helps researchers better discover and evaluate scientific articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by researchers from dozens of countries and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.