Photonic crystals in lithium niobate by combining focussed ion beam writing and ion‐beam enhanced etching

Geiß, Reinhard; Diziain, Séverine; Steinert, Michael; Schrempel, Frank; Kley, Ernst‐Bernhard; Tünnermann, Andreas; Pertsch, Thomas

doi:10.1002/pssa.201431328

Cited by 30 publications

(31 citation statements)

References 21 publications

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“…We have demonstrated 2D LN PhC slab nanoresonators with optical Q up to 3.51 × 10 5 that is about three orders of magnitude higher than other 2D LN PhC nanoresonators reported to date . The high optical Q together with tight optical mode confinement results in intriguing nonlinear optical interactions, allowing us to observe both second‐ and third‐harmonic generation .…”

Section: Discussionmentioning

confidence: 86%

“…The great application potential has attracted significant attention recently to develop LN photonic devices on chip‐scale platforms . However, realizing high‐quality 2D LN PhC structures remains significant challenge, which becomes the major obstacle hindering the exploration of optical phenomena in the nanoscopic scale that would potentially result in intriguing device characteristics and novel functionalities inaccessible by conventional means.…”

Section: Introductionmentioning

confidence: 99%

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High‐Q 2D Lithium Niobate Photonic Crystal Slab Nanoresonators

Liang

Luo

et al. 2019

Laser & Photonics Reviews

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Lithium niobate (LN), known as the “silicon of photonics,” exhibits outstanding material characteristics with great potential for broad applications. Enhancing light–matter interaction on the nanoscale would result in intriguing device characteristics that enable new physical phenomena to be revealed and novel functionalities inaccessible by conventional means to be realized. High‐Q 2D photonic crystal (PhC) slab nanoresonators are particularly suitable for this purpose, which, however, remains an open challenge to be realized on the lithium niobate platform. Here, an important step is taken toward this direction, demonstrating 2D LN PhC slab nanoresonators with optical Q as high as 3.51 × 105, about three orders of magnitude higher than other 2D LN PhC structures reported to date. The high optical quality, tight mode confinement, together with specific polarization characteristics of the devices enable the peculiar anisotropy of photorefraction quenching and unique anisotropic thermo‐optic nonlinear response to be revealed. They also allow the observation of third‐harmonic generation in on‐chip LN nanophotonic devices, and a strong orientation‐dependent generation of the second harmonic.

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Section: Discussionmentioning

confidence: 86%

Section: Introductionmentioning

confidence: 99%

High‐Q 2D Lithium Niobate Photonic Crystal Slab Nanoresonators

Liang

Luo

et al. 2019

Laser & Photonics Reviews

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“…For the y ‐polarization, the resonance valleys are shallow with reduced contrasts. Such differences may result from the LN structure roughness, the Ga + contamination by FIB, all of which would deteriorate optical performance, but were not considered in the simulations …”

Section: Resultsmentioning

confidence: 99%

“…Such differences may result from the LN structure roughness, the Ga + contamination by FIB, all of which would deteriorate optical performance, but were not considered in the simulations. [49] The spectral resonances could be explained by the interference of a broad resonance (supported by individual LN ridge) and a narrow resonance (lattice resonance of the whole structure). [50] This can be attributed to Wood's anomaly, or to the more encompassing concept of Fano resonance.…”

Section: Resultsmentioning

confidence: 99%

Lithium Niobate Metasurfaces

Gao

Ren

et al. 2019

Laser & Photonics Reviews

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Lithium niobate is a multi‐functional material, which has been regarded as one of the most promising platforms for the multipurpose optical components and photonic circuits. Targeting miniature optical components and systems, lithium niobate microstructures with feature sizes of several to hundreds of micrometers are demonstrated, such as waveguides, photonic crystals, micro cavities, and modulators, and so on. In order to demonstrate the possibilities toward further shrinking the footprint of the lithium niobate devices with new optical functionalities, here, subwavelength nanograting metasurfaces are fabricated based on a crystalline lithium niobate film. Due to the collective lattice interactions between isolated ridge resonances, distinct transmission spectral resonances are observed, which could be tunable by varying the structural parameters. Furthermore, the metasurfaces are capable of showing high‐efficiency transmission structural colors as a result of structural resonances and intrinsic high transparency of lithium niobate in visible spectral range. The results pave the way for new types of ultracompact photonic devices based on lithium niobate.

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“…Nonetheless, it is slow and limited to small sample areas. Moreover, the FIB damages the crystal structure of the remaining substrate material which affects its optical properties [35,36]. Other structuring technologies use lithographically patterned masks that are transferred into the LiNbO 3 substrate, for example by reactive-ion etching or ion-beam etching.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of free-standing lithium niobate nanowaveguides down to 50 nm in width

Geiß¹,

Sergeyev²,

Hartung³

et al. 2015

Nanotechnology

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Nonlinear optical nanoscale waveguides are a compact and powerful platform for efficient wavelength conversion. The free-standing waveguide geometry opens a range of applications in microscopy for local delivery of light, where in situ wavelength conversion helps to overcome various wavelength-dependent issues, such as biological tissue damage. In this paper, we present an original patterning method for high-precision fabrication of free-standing nanoscale waveguides based on lithium niobate, a material with a strong second-order nonlinearity and a broad transparency window covering the visible and mid-infrared wavelength ranges. The fabrication process combines electron-beam lithography with ion-beam enhanced etching and produces nanowaveguides with lengths from 5 to 50 μm, widths from 50 to 1000 nm and heights from 50 to 500 nm, each with a precision of few nanometers. The fabricated nanowaveguides are tested in an optical characterization experiment showing efficient second-harmonic generation.

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Photonic crystals in lithium niobate by combining focussed ion beam writing and ion‐beam enhanced etching

Cited by 30 publications

References 21 publications

High‐Q 2D Lithium Niobate Photonic Crystal Slab Nanoresonators

High‐Q 2D Lithium Niobate Photonic Crystal Slab Nanoresonators

Lithium Niobate Metasurfaces

Fabrication of free-standing lithium niobate nanowaveguides down to 50 nm in width

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