A wide acceptance angle first-order reflectron lens has been incorporated into a three-dimensional atom probe ͑3DAP͒ to provide improved mass resolution. This new 3DAP instrument is capable of resolving isotopes in the mass spectrum, with resolutions better than m/⌬mϭ500 full width at half maximum and 250 full width at 10% maximum. However, use of a reflectron for energy compensation within an imaging system means that improvements in mass resolution result in degradation of the spatial resolution. This artic…
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