Palladium‐Decorated Silicon Nanomesh Fabricated by Nanosphere Lithography for High Performance, Room Temperature Hydrogen Sensing

Gao, Min; Cho, Minkyu; Han, Hyeuk Jin; Jung, Yeon Sik; Park, Inkyu

doi:10.1002/smll.201703691

Cited by 55 publications

(57 citation statements)

References 49 publications

(79 reference statements)

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“…In the case of dry air, t 90 was increased by a factor of 2 (t 90 = 50 s against 20 s in Ar). Whilst in humid air, the response time was much slower with t 90 = 250 s. Similar results which show different response times as a function of the carrying gas and of the presence of humidity have been obtained previously [68,71,72]. Yet, the detection time t detect in this latter case is still lower than 1s as shown in the insert of fig 8.b.…”

Section: Selectivity ; H 2 In Dry or Humid Airsupporting

confidence: 84%

Ultrasensitive and fast single wavelength plasmonic hydrogen sensing with anisotropic nanostructured Pd films

Watkins

Borensztein

2018

Sensors and Actuators B: Chemical

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Anisotropic nanostructured porous Pd films are fabricated using oblique angle deposition in vacuum on a glass substrate.They display a dichroic response, due to localised surface plasmon resonances (LSPR) within the nanoparticles forming the film, dependent on the incident light polarisation. Ultrasensitive hydrogen sensing is reached by using these films in conjunction with a differential optical technique derived from the reflectance anisotropy spectroscopy. The evolution of the samples' optical responses is monitored during the formation of Pd hydride in both the dilute α-phase and the dense βphase, whilst the samples are exposed to different concentration of H 2 in Ar (from 100% H 2 to a few ppm). The measurements are performed at a single wavelength in the visible range and at 22°C. The results show that a quantitative measurement of the hydrogen concentration in a carrier gas can be measured throughout the concentration range. The limit of detection is 10 ppm and the time for detecting the presence of H 2 in the carrying gas is below one second at concentration down to 0.25% of H 2 in Ar. Furthermore, the optical anisotropy of the samples and its evolution with exposure to H 2 are correctly reproduced with an effective medium theory.

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Section: Selectivity ; H 2 In Dry or Humid Airsupporting

confidence: 84%

Ultrasensitive and fast single wavelength plasmonic hydrogen sensing with anisotropic nanostructured Pd films

Watkins

Borensztein

2018

Sensors and Actuators B: Chemical

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“…Chemically sensitive inorganic elements, which have high affinity with odorless target gases, can supplement these missing detection capabilities. Palladium (Pd) has been widely used as a functional material for hydrogen (H 2 ) sensing, which is undetectable with a biological sensory system, because H 2 is colorless and odorless. Recent chemical sensitive transistors demonstration included such gas detectors (Figure i), where Pd was used as the primary perception element in the FET‐based transducer to induce current change in response to H 2 absorption .…”

Section: Olfactory and Gustatory Sensory System‐inspired Electronicsmentioning

confidence: 99%

Bioinspired Electronics for Artificial Sensory Systems

et al. 2018

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Humans have a myriad of sensory receptors in different sense organs that form the five traditionally recognized senses of sight, hearing, smell, taste, and touch. These receptors detect diverse stimuli originating from the world and turn them into brain‐interpretable electrical impulses for sensory cognitive processing, enabling us to communicate and socialize. Developments in biologically inspired electronics have led to the demonstration of a wide range of electronic sensors in all five traditional categories, with the potential to impact a broad spectrum of applications. Here, recent advances in bioinspired electronics that can function as potential artificial sensory systems, including prosthesis and humanoid robots are reviewed. The mechanisms and demonstrations in mimicking biological sensory systems are individually discussed and the remaining future challenges that must be solved for their versatile use are analyzed. Recent progress in bioinspired electronic sensors shows that the five traditional senses are successfully mimicked using novel electronic components and the performance regarding sensitivity, selectivity, and accuracy have improved to levels that outperform human sensory organs. Finally, neural interfacing techniques for connecting artificial sensors to the brain are discussed.

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“…However, the weakness of those materials was that the heat source is needed in their MEMS platform. To solve the MEMS gas sensing at room temperature, metal particles were reported for gas sensing with an advantage in good selectivity than metal oxide [82,83]. Gao et al developed silicon-based nanosphere lithography for hydrogen (H 2 ) sensing as shown in Figure 5b.…”

Section: Mems Gas Sensormentioning

confidence: 99%

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

et al. 2019

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With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings’ manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.

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Palladium‐Decorated Silicon Nanomesh Fabricated by Nanosphere Lithography for High Performance, Room Temperature Hydrogen Sensing

Cited by 55 publications

References 49 publications

Ultrasensitive and fast single wavelength plasmonic hydrogen sensing with anisotropic nanostructured Pd films

Ultrasensitive and fast single wavelength plasmonic hydrogen sensing with anisotropic nanostructured Pd films

Bioinspired Electronics for Artificial Sensory Systems

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

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