Micro-Manufacturing Engineering and Technology 2010
DOI: 10.1016/b978-0-8155-1545-6.00001-6
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Overview of Micro-Manufacturing

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Cited by 31 publications
(20 citation statements)
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References 49 publications
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“…In this study we introduced a large area fine resolution sintering optics design to sinter a 2.3 mm by 1.3 mm area of sub-μm thick metal nanoparticle layer with an optical resolution of 1.2 μm in one shot. This design allows for the application of the system in high throughput metal/polymer micro-AM production environments such as fabrication of IC packaging building blocks, fabrication of 3D microcomponents/assemblies for applications in microelectromechanical systems (MEMS), biochips, photonic crystals, microfluidic chips, microsensors, and micro-optoelectromechanical systems (MOEMS) along with other possible applications [38][39][40]…”
Section: Resultsmentioning
confidence: 99%
“…In this study we introduced a large area fine resolution sintering optics design to sinter a 2.3 mm by 1.3 mm area of sub-μm thick metal nanoparticle layer with an optical resolution of 1.2 μm in one shot. This design allows for the application of the system in high throughput metal/polymer micro-AM production environments such as fabrication of IC packaging building blocks, fabrication of 3D microcomponents/assemblies for applications in microelectromechanical systems (MEMS), biochips, photonic crystals, microfluidic chips, microsensors, and micro-optoelectromechanical systems (MOEMS) along with other possible applications [38][39][40]…”
Section: Resultsmentioning
confidence: 99%
“…Unlike micro-laser beam machining and lithographic techniques, it does not require a very expensive setup, which enables the fabrication of miniatures at an economically reasonable cost. 53 Micromilling and micro turning are the two most used mechanical cutting processes. Recently, multicutter-based micromilling process has been studied 54 and found to be more economic and faster when compared to other contemporary micromachining processes.…”
Section: Methods Of Fabricating Microchannelsmentioning
confidence: 99%
“…LIGA (German abbreviation for Lithography, Galvanoformung (electroplating) and Abformung (Molding)) enables the precise manufacturing of high aspect ratio microchannels ranging from 100–1000 µm. 53 LIGA exploits all the advantages of X-ray lithography. It involves high-energy X-rays and galvanizing techniques to fill the mold by a metal.…”
Section: Methods Of Fabricating Microchannelsmentioning
confidence: 99%
“…In general, the main challenges to micro manufacturing are cost, accuracy, precision, and standardization. [101] These challenges stem from a number of different technical concerns, for example in industrial forming operations, grain sizes are generally considered small and homogenous but with micro manufacturing grains can be considered anisotropic which adds complexity to forming operations as shown in Fig. 43.…”
Section: Micro Hydroformingmentioning
confidence: 99%