Oven-Controlled MEMS Oscillator with Integrated Micro-Evaporation Trimming

Abstract

This study reports an oven-controlled microelectromechanical systems oscillator with integrated micro-evaporation trimming that achieves frequency stability over the industrial temperature range and permanent frequency trimming after vacuum packaging. The length-extensional-mode resonator is micro-oven controlled and doped degenerately with phosphorous to achieve a frequency instability of ±2.6 parts per million (ppm) in a temperature range of −40 to 85 °C. The micro-evaporators are bonded to the resonator, integrated face-to-face, and encapsulated in vacuum. During trimming, the micro-evaporators are heated electrically, and the aluminum layers on their surfaces are evaporated and deposited on the surface of the resonator that trims the resonant frequency of the resonator permanently. The impact of the frequency trimming on the temperature stability is very small. The temperature drift increases from ±2.6 ppm within the industrial temperature range before trimming to ±3.3 ppm after a permanent trimming of −426 ppm based on the local evaporation of Al. The trimming rate can be controlled by electric power. A resonator is coarse-trimmed by approximately −807 ppm with an evaporation power of 960 mW for 0.5 h, and fine-trimmed by approximately −815 ppm with an evaporation power of 456 mW for 1 h. Though the Q-factor decreases after trimming, a Q-factor of 304,240 is achieved after the trimming of −1442 ppm.

Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage

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A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators

“…In 2020, Pei reported an OCMO with integrated micro-evaporation fine-tuning and permanent frequency tuning after vacuum packaging. The designed phosphorus-doped length-extension mode resonator was temperature-controlled by a micro-oven to achieve a frequency stability of ±2.6 ppm in the temperature range of −40 °C to 85 °C [ 15 ]. Ortiz proposed a novel dual-mode lamé resonator and a dual-mode DETF resonator.…”