Optimization of Backscattered Electron (BSE) Detector for Variable Pressure SEM with Monte Carlo method

Abstract

This work deals with The study of the energy and angular distributions of backscattered electrons (BSE) detected under vacuum and with pressure, which contribute to determining the appropriate place to put the BSE detector, we examine vacuum and air gas, the diameters of detector, we discuss its influence on the energy and angular distribution of BSE in the sample by Monte Carlo simulation to find the optimum experimental parameters needed for BSE imaging in VPSEM. For this aim, we have chosen: SiO2 as dielectric material and carbon for his lower atomic number in our results under vacuum shows that the limited geometry of the detector (detector radius) causes a great reduction of the BSE signal, The analyses demonstrate the location of a BSE detector relative to a sample surface will have a strong influence on its collection efficiency.