Smart Mater. Struct. volume 22, issue 7, P075036 2013 DOI: 10.1088/0964-1726/22/7/075036 View full text
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Roba El Khoury Moussa, Mathieu Grossard, Mehdi Boukallel, Arnaud Hubert, Nicolas Chaillet

Abstract: Abstract.This paper deals with the optimal design of monolithic piezoelectric microactuators with integrated proprioceptive sensors. Dedicated to the microrobotic and micromechatronic elds, these works detail the modelling and the characterization of compliant structures with integrated actuating and sensing elements. The proposed optimal design procedure adresses not only static criteria but also dynamic ones. This leads to microdevices which are more performant with regards to mechanical (displacement, forc…

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