Abstract:An on-chip thin-film microtransformer with an improved coupling factor is shown in this paper. In addition to the development of this component, the characterization of the microtransformer and its use in the data transmission application are presented. In comparison to previous work, this microtransformer device shows an improved coupling factor. The microtransformer is fabricated on silicon substrate using thin-film technology. The fabrication is based on damascene process and combines material deposition us… Show more
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