A kinetic model of the sheath and presheath is presented that includes the effects of charge-exchange collisions on the ions. The collisions are modeled as a sink for accelerated ions and as a souce of cold ions. Solutions are obtained by numerical integration of Poisson's equation from a point near the plasma midplane to the wall. As the mean free path is decreased, the current density at the wall decreases and the potential profile in the presheath shows a smooth transition from a parabolic profile to a nea…
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