Novel synthesis of CuW composite reinforced with lamellar precipitates via aluminothermic reduction

Cheng, Chu; Song, Ziwei; Wang, Ling‐Feng; Song, Kexing; Huang, Tao; Zhao, Lei; Wang, Lisha; Zhang, Dou; Zhang, Ting‐an

doi:10.1007/s12598-022-02092-0

Cited by 8 publications

(1 citation statement)

References 33 publications

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“…However, they are not suitable for refractory metals with low ductility [9]. In contrast, the "bottom-up" method involves synthesizing fine powders of refractory metals and sintering them under high temperatures [9,[20][21][22]. This process allows for the production of dense and homogeneous refractory metal targets.…”

Section: Introductionmentioning

confidence: 99%

Hot-Pressing Deformation Yields Fine-Grained, Highly Dense and (002) Textured Ru Targets

Liu,

Xu,

Zhou

et al. 2023

Materials

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Ruthenium (Ru) is a refractory metal that has applications in the semiconductor industry as a sputtering target material. However, conventional powder metallurgy methods cannot produce dense and fine-grained Ru targets with preferred orientation. Here, we present a novel method of hot-pressing deformation to fabricate Ru targets with high relative density (98.8%), small grain size (~4.4 μm) and strong (002) texture. We demonstrate that applying pressures of 30–40 MPa at 1400 °C transforms cylindrical Ru samples into disk-shaped targets with nearly full densification in the central region. We also show that the hardness and the (002)/(101) peak intensity ratio of the targets increase with the pressure, indicating enhanced mechanical and crystallographic properties. Our study reveals the mechanisms of densification and texture formation of Ru targets by hot-pressing deformation.

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