Novel Self-shrinking Mask for Sub-3 nm Pattern Fabrication

Yang, Po-Shuan; Cheng, Po‐Jen; Kao, C. R.; Chen, Miin-Jang

doi:10.1038/srep29625

Cited by 7 publications

(6 citation statements)

References 41 publications

(45 reference statements)

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“…However, limited by the resolution of the gallium ion beam, beam diameter, beam shape and Micromachines 2022, 13, 923 2 of 18 redeposition, the typical feature size of the hole is always above 10 nm [24]. Furthermore, chemical ways such as ion track etching [25,26], mask etching [27] and chemical solution etching [28,29] were explored to fabricate the solid-state nanopore directly in polymer membrane. Although the smallest diameter was down 2 nm [30], rough hole wall and the specific material requirement limit the widespread use.…”

Section: Introductionmentioning

confidence: 99%

Controllable Shrinking Fabrication of Solid-State Nanopores

et al. 2022

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Nanopores have attracted widespread attention in DNA sequencing and protein or biomarker detection, owning to the single-molecule-scale detection accuracy. Despite the most use of naturally biological nanopores before, solid-state nanopores are widely developed with strong robustness, controllable sizes and geometries, a wide range of materials available, as well as flexible manufacturing. Therefore, various techniques typically based on focused ion beam or electron beam have been explored to drill nanopores directly on free-standing nanofilms. To further reduce and sculpt the pore size and shape for nano or sub-nano space-time sensing precision, various controllable shrinking technologies have been employed. Correspondingly, high-energy-beam-induced contraction with direct visual feedback represents the most widely used. The ability to change the pore diameter was attributed to surface tension induced original material migration into the nanopore center or new material deposition on the nanopore surface. This paper reviews typical solid-state nanopore shrinkage technologies, based on the careful summary of their principles and characteristics in particularly size and morphology changes. Furthermore, the advantages and disadvantages of different methods have also been compared completely. Finally, this review concludes with an optimistic outlook on the future of solid-state nanopores.

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Section: Introductionmentioning

confidence: 99%

Controllable Shrinking Fabrication of Solid-State Nanopores

et al. 2022

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“…Nanomachines have attracted a lot of attention recently with the rapid development of nanotechnology [ 1 , 2 ] and the urgent requirements in chemical and biological engineering [ 3 , 4 ], especially after the 2016 Nobel Prize in Chemistry was issued to three scientists (i.e., Jean-Pierre Sauvage, Sir J. Fraser Stoddart, and Bernard L. Feringa) who have made brilliant contributions to the field [ 5 ]. The Nano-Electro-Mechanical System (NEMS) [ 6 ] is considered to be one of the important components in nanotechnology, which has the characteristics of quantum effect, interface effect, size effect, and so on.…”

Section: Introductionmentioning

confidence: 99%

Dynamic Behavior of Rotation Transmission Nano-System in Helium Environment: A Molecular Dynamics Study

Zheng

Jiang

Qin³

et al. 2021

Molecules

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The molecular dynamics (MD) method is used to investigate the influence of the shielding gas on the dynamic behavior of the heterogeneous rotation transmission nano-system (RTS) built on carbon nanotubes (CNTs) and boron nitride nanotube (BNNT) in a helium environment. In the heterogeneous RTS, the inner CNT acts as a rotor, the middle BNNT serves as a motor, and the outer CNT functions as a stator. The rotor will be actuated to rotate by the motor due to the interlayer van der Waals effects and the end effects. The MD simulation results show that, when the gas density is lower than a critical range, a stable signal of the rotor will arise on the output and the rotation transmission ratio (RRT) of RTS can reach 1.0, but as the gas density is higher than the critical range, the output signal of the rotor cannot be stable due to the sharp drop of the RRT caused by the large friction between helium and the RTS. The greater the motor input signal of RTS, the lower the critical working helium density range. The results also show that the system temperature and gas density are the two main factors affecting the RTS transmission behavior regardless of the size of the simulation box. Our MD results clearly indicate that in the working temperature range of the RTS from 100 K to 600 K, the higher the temperature and the lower the motor input rotation frequency, the higher the critical working helium density range allows.

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“…It consists in irradiating a solid target with a broad ion beam impinging under a well-defined incidence angle θ to the surface normal [9,10]; this erodes material out, surprisingly inducing nanoscale surface ripples, as experimentally found quite early on [11,12]. * jamunoz@math.uc3m.es To date, these nanopatterns have found a large number of applications for, e.g., optoelectronics [13,14], photovoltaics [15], nanolithography [16,17], biomedicine [18,19], or the synthesis of novel structures [20] and materials [21], holding potential for many other [7].…”

Section: Introductionmentioning

confidence: 99%

Stress-driven nonlinear dynamics of ion-induced surface nanopatterns

2019

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For many solid targets, like semiconductors, that become amorphous under irradiation by energetic ions, the outermost surface layer displays formation of asymmetric nanoscale ripples in macroscopic timescales. In contrast to the well-known macroscopic case of an incompressible thin fluid film spreading down an incline, in which the morphological instability is controlled by gravity, here we prove that residual stress induced by the ions is responsible for pattern formation and accounts for its long-time dynamics, even in absence of sputtering effects. Using a continuum framework, we derive closed nonlinear evolution equations for the depth of the irradiated layer. This description includes novel terms associated with the spatial distribution of damage that builds up through sustained bombardment, thus extending to the nanoscale classic models of macroscopic fluidflow systems, and providing detailed information on the pressure and velocity fields within the irradiated layer. Numerical simulations reproduce the main dynamical features of surface nanopatterning under the assumed conditions, elucidating the ensuing nonlinear properties on ripple amplification and transport.

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Novel Self-shrinking Mask for Sub-3 nm Pattern Fabrication

Cited by 7 publications

References 41 publications

Controllable Shrinking Fabrication of Solid-State Nanopores

Controllable Shrinking Fabrication of Solid-State Nanopores

Dynamic Behavior of Rotation Transmission Nano-System in Helium Environment: A Molecular Dynamics Study

Stress-driven nonlinear dynamics of ion-induced surface nanopatterns

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