DOI: 10.4028/www.scientific.net/kem.407-408.81
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Hiroshi Mizumoto, Makoto Yabuya

Abstract: For ultraprecision machine tool of the next generation, two novel positioning devices are invented by the authors. The first positioning device of nanometer and sub-nanometer resolution with long stroke is the Twist-roller Friction Drive (TFD). For long stroke with 1nm of positioning resolution, the TFD is driven by a servomotor, and it is driven by a piezoelectric actuator for short stroke with 0.1nm of positioning resolution. The second positioning device of short stroke picometer resolution is an active aer…

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