Notice of Violation of IEEE Publication Principles: Optical Coupling of 3D Silicon Micromirrors

Fawzy, Ahmed; Elghandour, Osama; Hamed, Hesham F. A.

doi:10.1109/nems.2018.8556972

Cited by 1 publication

(1 citation statement)

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“…The continuous advances in Si-based MOEMS technology guarantee the realization of various novel micromirrors, and greatly promote the design of micromirrors and MMAs. A variety of MOEMS mirrors are also constantly emerging for use in different fields, such as micro multi-mirrors [46] , multilayer Si mirrors [47] , rotational MEMS mirrors [48] , ultrathin MEMS micromirror [49] , and monolithic 3D Si micromirrors [50] .…”

Section: Micromirrors and Micromirror Arraysmentioning

confidence: 99%

Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review

Chen¹,

Zhang²,

Hong³

et al. 2022

J. Semicond.

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Micro-optical electromechanical systems (MOEMS) combine the merits of micro-electromechanical systems (MEMS) and micro-optics to enable unique optical functions for a wide range of advanced applications. Using simple external electromechanical control methods, such as electrostatic, magnetic or thermal effects, Si-based MOEMS can achieve precise dynamic optical modulation. In this paper, we will briefly review the technologies and applications of Si-based MOEMS. Their basic working principles, advantages, general materials and micromachining fabrication technologies are introduced concisely, followed by research progress of advanced Si-based MOEMS devices, including micromirrors/micromirror arrays, micro-spectrometers, and optical/photonic switches. Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing, they have several promising applications in optical communications, digital light processing, and optical sensing. Finally, future research and development prospects of Si-based MOEMS are discussed.

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