Non-contact on-machine measurement using a chromatic confocal probe for an ultra-precision turning machine

Zou, Xicong; Zhao, Xuesen; Li, Guo; Li, Zengqiang; Sun, Tao

doi:10.1007/s00170-016-9494-3

Cited by 73 publications

(33 citation statements)

References 26 publications

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“…The confocal microscopic measurement method has the ability to perform axial chromatography, which can measure the 3D morphology of the measured sample combined with transverse scanning. Chromatic confocal measurement is a representative confocal microscopy technique with nanoscale measurement resolution and measurement accuracy, which can be directly evaluated by spectral signal to obtain the position height information of the point along the optical axis on the surface of the workpiece [12,13]. Nanovea, in the United States, realizes an accurate measurement of the surface topography of the DOE based on the ST400 3D non-contact surface profilometer, developed by a confocal probe, which allows the height and spacing information of the diffraction structure to be determined.…”

Section: Introductionmentioning

confidence: 99%

Measurement and Analysis of the Stepwise Curved Surface of Diffractive Optical Elements by a Constant Speed Confocal Probe

Zhu

Dong

et al. 2019

Applied Sciences

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Diffractive optical elements (DOEs) play an important role in improving imaging quality and reducing system volume. The measurement of DOE surface topography is of great significance to the evaluation of DOE quality and the optimization of its manufacturing process. However, there are still some difficulties in measuring the large curvature and the large sag of curve-based DOEs. In this paper, considering the geometrical feature information and measurement problems of curve-based DOEs, a measurement method based on a confocal measurement principle for DOE measurement is proposed. The proposed measurement data processing method is verified by a high-precision motion axis system and the stability of an ultra-precision lathe. The results show that the proposed measurement method can reconstruct and accurately evaluate the three-dimensional surface topography of DOEs.

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Section: Introductionmentioning

confidence: 99%

Measurement and Analysis of the Stepwise Curved Surface of Diffractive Optical Elements by a Constant Speed Confocal Probe

Zhu

Dong

et al. 2019

Applied Sciences

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“…Optical profilers and interference microscopes provide feasible and noncontact ways to achieve microscopic measurement. The point-to-point sampling data in profilers [4,5] needs to be spliced to obtain the full-aperture surface; besides, the measurement with the profiler is inefficient, time-consuming and can be easily affected by scanning mechanism precision and environmental disturbance. The interference microscope [6][7][8][9] has been serving as an accurate, highly efficient way for the roughness measurement.…”

Section: Introductionmentioning

confidence: 99%

Transient microscopic testing method based on deflectometry

Wang

Xie

et al. 2019

Optical Design and Testing IX

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The deflectometry provides an optical testing method with ultra-high dynamic range. In this paper, a microscopic testing method based on deflectometric technique is proposed to quantitatively evaluate the microstructures according to the wavefront aberration. To achieve the real-time and accurate wavefront testing for microstructure evaluation, a colorcoded phase-shifting fringe pattern is applied to illuminate the test object. It avoids the sequential projection of multistep phase-shifting fringes in traditional deflectometry, enabling the transient wavefront testing. The feasibility of the proposed transient microscopic testing method is demonstrated by the experiment. The proposed method enables accurate and transient testing of microstructures with high dynamic range, minimizing the environmental disturbance.

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“…It is usually necessary to remove the part from the machine for off-line metrology and then remount it back to the machine if the part is not fabricated to the specification, increasing the fabrication time and introducing extra errors. Various on-machine metrology or inprocess inspection techniques, 1,2 including hybrid vision system, 3 chromatic confocal, [4][5][6] deflectometry, 7 and interferometry, [8][9][10] have been developed to address this issue. However, all these methods are designed for either measuring surface shape or surface roughness, but not both.…”

Section: Introductionmentioning

confidence: 99%

Dual-mode snapshot interferometric system for on-machine metrology

et al. 2019

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For the first time, we present a dual-mode snapshot interferometric system for measuring both surface shape and surface roughness to meet the need for on-machine metrology in optical fabrication. Two different modes, interferometer mode and interference microscopy mode, are achieved using Linnik configuration. To realize snapshot measurement, a pixelated polarization camera is used to capture four phase-shifted interferograms simultaneously. We have demonstrated its performance for off-line metrology and on-machine metrology by mounting it on a diamond turning machine.

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Non-contact on-machine measurement using a chromatic confocal probe for an ultra-precision turning machine

Cited by 73 publications

References 26 publications

Measurement and Analysis of the Stepwise Curved Surface of Diffractive Optical Elements by a Constant Speed Confocal Probe

Measurement and Analysis of the Stepwise Curved Surface of Diffractive Optical Elements by a Constant Speed Confocal Probe

Transient microscopic testing method based on deflectometry

Dual-mode snapshot interferometric system for on-machine metrology

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