New Endoscopic Imaging Technology Based on MEMS Sensors and Actuators

Abstract

Over the last decade, optical fiber-based forms of microscopy and endoscopy have extended the realm of applicability for many imaging modalities. Optical fiber-based imaging modalities permit the use of remote illumination sources and enable flexible forms supporting the creation of portable and hand-held imaging instrumentations to interrogate within hollow tissue cavities. A common challenge in the development of such devices is the design and integration of miniaturized optical and mechanical components. Until recently, microelectromechanical systems (MEMS) sensors and actuators have been playing a key role in shaping the miniaturization of these components. This is due to the precision mechanics of MEMS, microfabrication techniques, and optical functionality enabling a wide variety of movable and tunable mirrors, lenses, filters, and other optical structures. Many promising results from MEMS based optical fiber endoscopy have demonstrated great potentials for clinical translation. In this article, reviews of MEMS sensors and actuators for various fiber-optical endoscopy such as fluorescence, optical coherence tomography, confocal, photo-acoustic, and two-photon imaging modalities will be discussed. This advanced MEMS based optical fiber endoscopy can provide cellular and molecular features with deep tissue penetration enabling guided resections and early cancer assessment to better treatment outcomes.

Damage Identification in Structural Health Monitoring: A Brief Review from its Implementation to the Use of Data-Driven Applications

“…This type of sensor uses miniaturization techniques in its construction [123], and different types of transducers can be combined. These sensors present advantages regarding the costs of implementation and maintenance [124].…”

“…In general, the design of the monitoring system in terms of hardware starts from the definition of the sensor/actuator system-defined according to the previous section-with components that include piezoelectric transducers, microelectromechanical systems, optical fibers, or acoustic sensors [123]. After that, the design of the monitoring system should also take into account additional hardware that will be used to capture, store, and transmit the information.…”

Scanning and Actuation Techniques for Cantilever-Based Fiber Optic Endoscopic Scanners—A Review

“…The review work in [ 17 ] provided a general description of confocal microscopy, OCT, and two-photon imaging modalities. Similarly, the review work in [ 18 ] investigated various imaging modalities with some information on their actuation mechanisms. The previous work [ 6 ] and the review article by Hwang et al in [ 19 ] provided a general description of various endoscopic imaging technologies, modalities, packaging/scanning configurations, and actuation mechanisms.…”

A Hydraulic Soft Microhand with an Application of Live Insect Manipulation

“…Electrostatic MEMS actuators are mainly based on the silicon microfabrication process [32]. The wellestablished fabrication process made this group of actuators an ideal and cost effective actuator as 2D structures and a good candidate for miniaturization [32] [33]. The challenges in proper packaging and isolation of MEMS actuators are the main drawbacks of this family of actuators [34].…”