Neural network modeling of GaAs IC material and MESFET device characteristics

Abstract

This paper provides an overview of research focused on the utilization of neurocomputing technology to model critical in‐process integrated circuit material and device characteristics. Artificial neural networks are employed to develop models of complex relationships between material and device characteristics at critical stages of the semiconductor fabrication process. Measurements taken and subsequently used in modeling include doping concentrations, layer thicknesses, planar geometries, resistivities, device voltages, and currents. The neural network architecture utilized in this research is the multilayer perceptron neural network (MLPNN). The MLPNN is trained in the supervised mode using the generalized delta learning rule. The MLPNN has demonstrated with good results the ability to model these characteristics, and provide an effective tool for parametric yield prediction and whole wafer characterization in semiconductor manufacturing. ©1999 John Wiley & Sons, Inc. Int J RF and Microwave CAE 9: 241–253, 1999.

Artificial Neural Networks for Microwave Computer-Aided Design: The State of the Art

“…FFNNs are usually used to solve non-dynamic modeling problems [1]. MLPs are the most popularly used FFNN structures, which are widely used in microwave modeling for both passive component modeling [7], [8], [9], [10], [15], [17], [18], [19], [22], [30], [31], [34], [76], [80], [83], [92], [93], [94], [95], [96], [97], [98], [99], [100], [101], [102], [103], [104], [105] and active device/circuit modeling [12], [13], [23], [24], [25], [29], [32], [33], [106], [107], [108], [109], [110], [111], [112], [113], [114], [115],…”

“…Increased research interests of ANN in the microwave community in the 1990s led to special issues on applications of ANN in microwave CAD (1999 and 2002 special issues of the Int. J. RF Microwave CAE) covering more topics, such as ANN structures and training [14], [15], [16], EM design acceleration [17], [18], [19], microwave filter design [17], [20], [21], [22], microwave amplifier design [23], [24], [25], [26], intermodulation distortion [27], coplanar waveguide (CPW) [28], microwave device modeling [29], microstrip antennas [30], [31], large-signal analysis [32], [33], multiconductor transmission line [34], and microwave This work is licensed under a Creative Commons Attribution 4.0 License. For more information, see https://creativecommons.org/licenses/by/4.0/ measurements [35].…”