Abstract:We discuss two methods for achieving optical resolution beyond the diffraction limit in air. The first method, the Solid Immersion Lens (SIL), improves optical resolution by increasing the numerical aperture (NA) beyond 1.0, the usual limit in air, to a maximum of n, the refractive index of the SIL. We present experimental results with a scanning optical microscope (1=400nm) based on a micromachined silicon nitride SIL that demonstrates optical resolution -1.9 times better with the SIL than without. Specifical… Show more
scite is a Brooklyn-based startup that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.