Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516)
DOI: 10.1109/nano.2001.966474 View full text |Buy / Rent full text
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Abstract: We discuss two methods for achieving optical resolution beyond the diffraction limit in air. The first method, the Solid Immersion Lens (SIL), improves optical resolution by increasing the numerical aperture (NA) beyond 1.0, the usual limit in air, to a maximum of n, the refractive index of the SIL. We present experimental results with a scanning optical microscope (1=400nm) based on a micromachined silicon nitride SIL that demonstrates optical resolution -1.9 times better with the SIL than without. Specifical… Show more

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