Nanotwinned metal MEMS films with unprecedented strength and stability

Sim, Gi Dong; Krogstad, Jessica A.; Reddy, Kolan Madhav; Xie, Kelvin; Valentino, Gianna M.; Weihs, Timothy P.; Hemker, Kevin J.

doi:10.1126/sciadv.1700685

Cited by 78 publications

(29 citation statements)

References 55 publications

(54 reference statements)

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“…The traditional alloy design concept combines one or two principal elements with additional minor elements, an approach that restricts the development and application of alloys due to the limited compositional space explored ( 1 ). Thus, to enable the pursuit of alloys with special microstructures and properties, such as high strength, new design concepts are needed.…”

Section: Introductionmentioning

confidence: 99%

A high-entropy alloy with hierarchical nanoprecipitates and ultrahigh strength

et al. 2018

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Section: Introductionmentioning

confidence: 99%

A high-entropy alloy with hierarchical nanoprecipitates and ultrahigh strength

et al. 2018

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“…Nanocrystalline metals, defined as having an average grain size less than 100 nm, are desirable in thin film applications such as flexible electronics [1], microelectromechanical systems [2], and coatings [3], but are subject to high stresses that can lead to micro-cracking and delamination [4].…”

Section: Graphical Abstractmentioning

confidence: 99%

Solid-state dewetting instability in thermally-stable nanocrystalline binary alloys

et al. 2020

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Practical applications of nanocrystalline metallic thin films are often limited by instabilities. In addition to grain growth, the thin film itself can become unstable and collapse into islands through solid-state dewetting. Selective alloying can improve nanocrystalline stability, but the impact of this approach on dewetting is not clear. In this study, two alloys that exhibit nanocrystalline thermal stability as ball milled powders are evaluated as thin films. While both alloys demonstrated dewetting behavior following annealing, the severity decreased in more dilute compositions. Ultimately, a balance may be struck between nanocrystalline stability and thin film structural stability by tuning dopant concentration.

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“…High tensile-strength material has also been invented, such as the nickel-molybdenum-tungsten alloy, which is a strong material invented by Kevin J. Hemker's team at Johns Hopkins University. It has good tensile and high-temperature resistance to meet the demand for MEMS to work in harsh environments [7]. With the continuous expansion of the scope and field of MEMS applications, researching for new basic MEMS materials, suitable for different application fields, is receiving increasing attention.…”

Section: Introductionmentioning

confidence: 99%

Experiment Research on Micro-/Nano Processing Technology of Graphite as Basic MEMS Material

Zhang

Liu

et al. 2019

Applied Sciences

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Graphite is expected to be a common choice for basic microelectromechanical-system (MEMS) material in the future. However, in order to become a basic MEMS material, it is very important for graphite to be adapted to the commonly-used micro-/nanoprocessing technology. Therefore, this paper used a directly lithography and etching process to study micro-, /nanoprocessing on graphite. The results show that the graphite surface is suitable for lithography, and that different shapes and sizes of photoresist patterns can be directly fabricated on the graphite surface. In addition, the micro-meter height of photoresist could still resist plasma etching when process nanometers height of graphite structures. Therefore, graphite with photoresist patterns were directly processed by etching, and nanometer amounts of graphite were etched. Moreover, micro-/nanoscale graphite structure with height ranges from 29.4 nm–30.9 nm were fabricated with about 23° sidewall.

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Nanotwinned metal MEMS films with unprecedented strength and stability

Abstract: Sputter deposited nanotwinned metal alloy films that possess exceptional properties attractive for next generation MEMS devices.

Cited by 78 publications

References 55 publications

A high-entropy alloy with hierarchical nanoprecipitates and ultrahigh strength

A high-entropy alloy with hierarchical nanoprecipitates and ultrahigh strength

Solid-state dewetting instability in thermally-stable nanocrystalline binary alloys

Experiment Research on Micro-/Nano Processing Technology of Graphite as Basic MEMS Material

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