“…1,2 Especially, various innovative 3D nano-and microdevices with overhanging structures have been fabricated by free-space-nanowiring using FIB-CVD. 3,4 However, it is difficult to fabricate overhanging structures larger than several micrometers because the growth characteristics start to change. In the case of fabricating a horizontal free-space-nanowire by scanning the FIB laterally, the nanowire deviates from the initial growth angle and turns downward.…”