2012
DOI: 10.1177/2211068212450289
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Nanofabrication Using Near-Field Optical Probes

Abstract: Nanofabrication using near-field optical probes is an established technique for rapid prototyping and automated maskless fabrication of nanostructured devices. In this review, we present the primary types of near-field probes and their physical processing mechanisms. Highlights of recent developments include improved resolution by optimizing the probe shape, incorporation of surface plasmonics in probe design, broader use in biological and magnetic storage applications, and increased throughput using probe arr… Show more

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Cited by 9 publications
(3 citation statements)
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“…). Nanopatterning using near‐field optical probes can be found in recent reviews . Briefly, SPL provides a versatile set of tools for both manipulating and imaging the topography of a surface with atomic‐scale resolution .…”
Section: Photomechanics and Photofluidization In Azopolymersmentioning
confidence: 99%
See 1 more Smart Citation
“…). Nanopatterning using near‐field optical probes can be found in recent reviews . Briefly, SPL provides a versatile set of tools for both manipulating and imaging the topography of a surface with atomic‐scale resolution .…”
Section: Photomechanics and Photofluidization In Azopolymersmentioning
confidence: 99%
“…Parallel approaches in SPL are being developed to overcome the serial limitations of standard SPL technologies. Nanofabrication by SPL is extensively reviewed elsewhere , and in this review we only emphasize the use of SPL in nanopatterning azopolymers.…”
Section: Photomechanics and Photofluidization In Azopolymersmentioning
confidence: 99%
“…It has attracted attention since it leads to the development of new functional nanomaterials and devices. There are many nanofabrication techniques from top-down lithographic methods using electron beam or nanosized probe tips to bottom-up ones based on chemical synthesis including self-assembly reactions. When ordinary light (i.e., propagating light) is used as the processing tool, fabrication on the subwavelength scale is difficult due to the diffraction limit. However, nanofabrication beyond the diffraction limit is possible if optical near field, which is localized in a subwavelength region but not propagated, is employed.…”
Section: Introductionmentioning
confidence: 99%