Nano-porous aluminum oxide membrane as filtration interface for optical gas sensor packaging

Ma, Ying; Kaczynski, Jaroslaw; Roshanghias, Ali; Zauner, Markus; Abasahl, Banafsheh

doi:10.1016/j.mee.2018.06.013

Cited by 21 publications

(19 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This study revealed that the modulation of polymer-coated membrane and pore size can effectively enhance the separation process [108]. Various other applications of AAO membranes for filtration purposes have been reported in the literature and are also given in Table 4 AAO based 3D microchannels 50 Microchannels for molecular separation [109] Two nano-porous AAO membranes sandwiched in between PDMS layers 30 80 Two AAO membranes sandwiched between PDMS for Exosomes Isolation [106] AAO membrane in micro hydraulic mechanical system 50 Vibro-active nano filter for filtration, separation, and transportation of particles, using standing surface acoustic waves (SSAW) [110] Optical gas sensing package covered with AAO membrane 40 Filtration interface to let air and other gases pass and prevent contaminations in forms of particles for an optical gas sensor [111] AAO tubular membrane 20 Potential application for hemodialysis [112] AAO membrane and polydimethylsiloxane (PDMS) microwells with through holes 25 Microwell-assisted filtration of algal solution [113] (Continued)…”

Section: Aao Membrane For Filtration 321 Applications Of Aao Membrane...mentioning

confidence: 99%

Recent Progress of Fabrication, Characterization, and Applications of Anodic Aluminum Oxide (AAO) Membrane: A Review

Manzoor¹,

Ashraf²,

Tayyaba³

et al. 2023

Computer Modeling in Engineering &Amp; Sciences

View full text Add to dashboard Cite

The progress of membrane technology with the development of membranes with controlled parameters led to porous membranes. These membranes can be formed using different methods and have numerous applications in science and technology. Anodization of aluminum in this aspect is an electro-synthetic process that changes the surface of the metal through oxidation to deliver an anodic oxide layer. This process results in a self-coordinated, exceptional cluster of round and hollow formed pores with controllable pore widths, periodicity, and thickness. Categorization in barrier type and porous type films, and different methods for the preparation of membranes, have been discussed. After the initial introduction, the paper proceeds with a brief overview of anodizing process. That engages anodic aluminum oxide (AAO) layers to be used as formats in various nanotechnology applications without the necessity for expensive lithographical systems. This review article surveys the current status of the investigation on AAO membranes. A comprehensive analysis is performed on AAO membranes in applications; filtration, sensors, drug delivery, template-assisted growth of various nanostructures. Their multiple usages in nanotechnology have also been discussed to gather nanomaterials and devices or unite them into specific applications, such as nano-electronic gadgets, channel layers, and clinical platforms tissue designing. From this review, the fact that the specified enhancement of properties of AAO can be done by varying geometric parameters of AAO has been highlighted. No review paper focused on a detailed discussion of multiple applications of AAO with prospects and challenges. Also, it is a challenge for the research community to compare results reported in the literature. This paper provides tables for easy comparison of reported applications with membrane parameters. This review paper represents the formation, properties, applications with objective consideration of the prospects and challenges of AAO applications. The prospects may appeal to researchers to promote the development of unique membranes with functionalization and controlled geometric parameters and check the feasibility of the AAO membranes in nanotechnology and devices.

show abstract

Section: Aao Membrane For Filtration 321 Applications Of Aao Membrane...mentioning

confidence: 99%

Recent Progress of Fabrication, Characterization, and Applications of Anodic Aluminum Oxide (AAO) Membrane: A Review

Manzoor¹,

Ashraf²,

Tayyaba³

et al. 2023

Computer Modeling in Engineering &Amp; Sciences

View full text Add to dashboard Cite

show abstract

“…Another promising application that is relevant for gas sensors is their protection from dust or moisture. Several groups have shown this principle at the chip- or package level, demonstrating that very thin structures that are still mechanically robust are needed in order to prevent unacceptable delays in sensor response [ 49 , 50 ]. With PowderMEMS, thin, microporous, protective caps can be fabricated at the wafer level and integrated with the MEMS devices using common wafer-level bonding techniques ( Figure 21 ).…”

Section: Applicationsmentioning

confidence: 99%

PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures

2022

View full text Add to dashboard Cite

A comprehensive overview of PowderMEMS—a novel back-end-of-line-compatible microfabrication technology—is presented in this paper. The PowderMEMS process solidifies micron-sized particles via atomic layer deposition (ALD) to create three-dimensional microstructures on planar substrates from a wide variety of materials. The process offers numerous degrees of freedom for the design of functional MEMSs, such as a wide choice of different material properties and the precise definition of 3D volumes at the substrate level, with a defined degree of porosity. This work details the characteristics of PowderMEMS materials as well as the maturity of the fabrication technology, while highlighting prospects for future microdevices. Applications of PowderMEMS in the fields of magnetic, thermal, optical, fluidic, and electrochemical MEMSs are described, and future developments and challenges of the technology are discussed.

show abstract

“…With the introduction of the AAO membrane, the system can prevent particle contamination above 70 nm. By varying the incorporated pore size of AAO, the sensitivity of sensor system to particle contamination could be fine-tuned [120]. Additionally, Tabrizi et al had designed a biosensor based on AAO via immobilized with DNAzyme.…”

Section: Photonic-and Electrical-related Devicesmentioning

confidence: 99%

The toolbox of porous anodic aluminum oxide–based nanocomposites: from preparation to application

Huang

Mutlu

2020

Colloid Polym Sci

View full text Add to dashboard Cite

Anodic aluminum oxide (AAO) templates have been intensively investigated during the past decades and have meanwhile been widely applied through both sacrificial and non-sacrificial pathways. In numerous non-sacrificial applications, the AAO membrane is maintained as part of the obtained composite materials; hence, the template structure and topography determine to a great extent the potential applications. Through-hole isotropic AAO features nanochannels that promote transfer of matter, while anisotropic AAO with barrier layer exhibits nanocavities suitable as independent and homogenous containers. By combining the two kinds of AAO membranes with diverse organic and inorganic materials through physical interactions or chemical bonds, AAO composites are designed and applied in versatile fields such as catalysis, drug release platform, separation membrane, optical appliances, sensors, cell culture, energy, and electronic devices. Therefore, within this review, a perspective on exhilarating prospect for complementary advancement on AAO composites both in preparation and application is provided.

show abstract

Nano-porous aluminum oxide membrane as filtration interface for optical gas sensor packaging

Cited by 21 publications

References 8 publications

Recent Progress of Fabrication, Characterization, and Applications of Anodic Aluminum Oxide (AAO) Membrane: A Review

Recent Progress of Fabrication, Characterization, and Applications of Anodic Aluminum Oxide (AAO) Membrane: A Review

PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures

The toolbox of porous anodic aluminum oxide–based nanocomposites: from preparation to application

Contact Info

Product

Resources

About