DOI: 10.1109/nano.2001.966473
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Abstract: A high resolution, from nanometer to sub-nanometer, stepping drive of a surface acoustic wave (SAW) motor is presented in this paper. A step displacement was controlled easily by a number of driving waves from centimeter order to nanometer order. Reduction of the driving waves down to 25 cycles, at 100 Vpeak driving voltage and 30 N pre-load condition, brought about 2 nm stepping drive with our experimental setup at open loop condition. We also demonstrated a sub-nanometer stepping drive. These experimental re…

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